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Dana Klein
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Haifa, IL
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Patents Grants
last 30 patents
Information
Patent Grant
Systems and methods for metrology optimization based on metrology l...
Patent number
11,725,934
Issue date
Aug 15, 2023
Dana Klein
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for providing a quality metric for improved proce...
Patent number
11,372,340
Issue date
Jun 28, 2022
KLA Corporation
Daniel Kandel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Per-site residuals analysis for accurate metrology measurements
Patent number
11,249,400
Issue date
Feb 15, 2022
KLA Corporation
Lilach Saltoun
G01 - MEASURING TESTING
Information
Patent Grant
Determining the impacts of stochastic behavior on overlay metrology...
Patent number
10,901,325
Issue date
Jan 26, 2021
KLA-Tencor Corporation
Evgeni Gurevich
G01 - MEASURING TESTING
Information
Patent Grant
Method and system for process control with flexible sampling
Patent number
10,754,260
Issue date
Aug 25, 2020
KLA-Tencor Corporation
Onur Demirer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Analyzing root causes of process variation in scatterometry metrology
Patent number
10,203,200
Issue date
Feb 12, 2019
KLA-Tencor Corporation
Tal Marciano
G01 - MEASURING TESTING
Information
Patent Grant
Selection and use of representative target subsets
Patent number
10,025,756
Issue date
Jul 17, 2018
KLA-Tencor Corporation
Dana Klein
G05 - CONTROLLING REGULATING
Information
Patent Grant
Feed forward of metrology data in a metrology system
Patent number
9,903,711
Issue date
Feb 27, 2018
KLA-Tencor Corporation
Ady Levy
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for estimating and correcting misregistration target inaccuracy
Patent number
9,329,033
Issue date
May 3, 2016
KLA-Tencor Corporation
Eran Amit
G01 - MEASURING TESTING
Information
Patent Grant
Method and system for providing process tool correctables
Patent number
9,052,709
Issue date
Jun 9, 2015
KLA-Tencor Corporation
Guy Cohen
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
Information
Patent Application
HIGH-RESOLUTION EVALUATION OF OPTICAL METROLOGY TARGETS FOR PROCESS...
Publication number
20240094639
Publication date
Mar 21, 2024
KLA Corporation
Nadav Gutman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and System for Providing a Quality Metric for Improved Proce...
Publication number
20230051705
Publication date
Feb 16, 2023
KLA Corporation
Daniel Kandel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Systems and Methods for Metrology Optimization Based on Metrology L...
Publication number
20220364855
Publication date
Nov 17, 2022
KLA Corporation
Dana Klein
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PER-SITE RESIDUALS ANALYSIS FOR ACCURATE METROLOGY MEASUREMENTS
Publication number
20200371445
Publication date
Nov 26, 2020
KLA Corporation
Lilach Saltoun
G01 - MEASURING TESTING
Information
Patent Application
DETERMINING THE IMPACTS OF STOCHASTIC BEHAVIOR ON OVERLAY METROLOGY...
Publication number
20190049858
Publication date
Feb 14, 2019
KLA-Tencor Corporation
Evgeni GUREVICH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Analyzing Root Causes of Process Variation in Scatterometry Metrology
Publication number
20180023950
Publication date
Jan 25, 2018
KLA-Tencor Corporation
Tal Marciano
G01 - MEASURING TESTING
Information
Patent Application
Method and System for Process Control with Flexible Sampling
Publication number
20160370718
Publication date
Dec 22, 2016
KLA-Tencor Corporation
Onur Demirer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Feed Forward of Metrology Data in a Metrology System
Publication number
20160290796
Publication date
Oct 6, 2016
KLA-Tencor Corporation
Ady Levy
G01 - MEASURING TESTING
Information
Patent Application
SELECTION AND USE OF REPRESENTATIVE TARGET SUBSETS
Publication number
20150025846
Publication date
Jan 22, 2015
KLA-Tenoor Corporation
Dana Klein
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR ESTIMATING AND CORRECTING MISREGISTRATION TARGET INACCURACY
Publication number
20140060148
Publication date
Mar 6, 2014
Eran Amit
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND SYSTEM FOR PROVIDING A QUALITY METRIC FOR IMPROVED PROCE...
Publication number
20130035888
Publication date
Feb 7, 2013
KLA-Tencor Corporation
Daniel Kandel
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND SYSTEM FOR PROVIDING PROCESS TOOL CORRECTABLES
Publication number
20120029856
Publication date
Feb 2, 2012
KLA-TENCOR CORPORATIOIN
Guy Cohen
G05 - CONTROLLING REGULATING