Daniel A. Brown

Person

Brentwood, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing devices having multi-port valve assemblies
- Patent number 12,100,575
- Issue date Sep 24, 2024
- Lam Research Corporation
- Daniel A. Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated tool lift
- Patent number 12,027,411
- Issue date Jul 2, 2024
- Lam Research Corporation
- Paul Albert Avanzino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated tool lift
- Patent number 11,495,486
- Issue date Nov 8, 2022
- Lam Research Corporation
- Paul Albert Avanzino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Moving substrate transfer chamber
- Patent number 11,282,737
- Issue date Mar 22, 2022
- Lam Research Corporation
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber with vertical support stem for symmetric conductance and RF...
- Patent number 10,665,435
- Issue date May 26, 2020
- Lam Research Corporation
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber with vertical support stem for symmetric conductance and RF...
- Patent number 10,395,902
- Issue date Aug 27, 2019
- Lam Research Corporation
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compression member for use in showerhead electrode assembly
- Patent number 10,332,729
- Issue date Jun 25, 2019
- Lam Research Corporation
- Darrell Ehrlich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Replaceable upper chamber parts of plasma processing apparatus
- Patent number 10,074,521
- Issue date Sep 11, 2018
- Lam Research Corporation
- Daniel Arthur Brown
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber with vertical support stem for symmetric conductance and RF...
- Patent number 10,049,862
- Issue date Aug 14, 2018
- Lam Research Corporation
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing devices having multi-port valve assemblies
- Patent number 10,037,869
- Issue date Jul 31, 2018
- Lam Research Corporation
- Daniel A. Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compression member for use in showerhead electrode assembly
- Patent number 9,922,804
- Issue date Mar 20, 2018
- Lam Research Corporation
- Darrell Ehrlich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Movable chamber liner plasma confinement screen combination for pla...
- Patent number 9,490,135
- Issue date Nov 8, 2016
- Lam Research Corporation
- Danny Brown
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Replaceable upper chamber parts of plasma processing apparatus
- Patent number 9,076,634
- Issue date Jul 7, 2015
- Lam Research Corporation
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compression member for use in showerhead electrode assembly
- Patent number 9,058,960
- Issue date Jun 16, 2015
- Lam Research Corporation
- Darrell Ehrlich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Movable chamber liner plasma confinement screen combination for pla...
- Patent number 8,597,462
- Issue date Dec 3, 2013
- Lam Research Corporation
- Danny Brown
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Vacuum sealing radio frequency (RF) and low frequency conducting ac...
- Patent number 8,597,428
- Issue date Dec 3, 2013
- Lam Research Corporation
- Danny Brown
- F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information Patent Grant
Quartz guard ring centering features
- Patent number 8,084,705
- Issue date Dec 27, 2011
- Lam Research Corporation
- Dean J. Larson
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Plasma processing chamber with guard ring for upper electrode assembly
- Patent number 7,939,778
- Issue date May 10, 2011
- Lam Research Corporation
- Dean J. Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quartz guard ring centering features
- Patent number 7,875,824
- Issue date Jan 25, 2011
- Lam Research Corporation
- Dean J. Larson
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Quartz guard ring
- Patent number 7,482,550
- Issue date Jan 27, 2009
- Lam Research Corporation
- Dean J. Larson
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
INTEGRATED TOOL LIFT
- Publication number 20240304490
- Publication date Sep 12, 2024
- LAM RESEARCH CORPORATION
- Paul Albert Avanzino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINEAR ARRANGEMENT FOR SUBSTRATE PROCESSING TOOLS
- Publication number 20230085987
- Publication date Mar 23, 2023
- LAM RESEARCH CORPORATION
- Danny Arthur BROWN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED TOOL LIFT
- Publication number 20230032820
- Publication date Feb 2, 2023
- LAM RESEARCH CORPORATION
- Paul Albert Avanzino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED TOOL LIFT
- Publication number 20220044958
- Publication date Feb 10, 2022
- LAM RESEARCH CORPORATION
- Paul Albert Avanzino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOVING SUBSTRATE TRANSFER CHAMBER
- Publication number 20200381285
- Publication date Dec 3, 2020
- LAM RESEARCH CORPORATION
- Daniel Arthur BROWN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF...
- Publication number 20190371579
- Publication date Dec 5, 2019
- LAM RESEARCH CORPORATION
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF...
- Publication number 20180323044
- Publication date Nov 8, 2018
- LAM RESEARCH CORPORATION
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING DEVICES HAVING MULTI-PORT VALVE ASSEMBLIES
- Publication number 20180323041
- Publication date Nov 8, 2018
- LAM RESEARCH CORPORATION
- Daniel A. Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPRESSION MEMBER FOR USE IN SHOWERHEAD ELECTRODE ASSEMBLY
- Publication number 20180174804
- Publication date Jun 21, 2018
- LAM RESEARCH CORPORATION
- Darrell Ehrlich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF...
- Publication number 20160307743
- Publication date Oct 20, 2016
- LAM RESEARCH CORPORATION
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING DEVICES HAVING MULTI-PORT VALVE ASSEMBLIES
- Publication number 20160033977
- Publication date Feb 4, 2016
- LAM RESEARCH CORPORATION
- Daniel A. Brown
- G05 - CONTROLLING REGULATING
Information Patent Application
REPLACEABLE UPPER CHAMBER PARTS OF PLASMA PROCESSING APPARATUS
- Publication number 20150279621
- Publication date Oct 1, 2015
- LAM RESEARCH CORPORATION
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPRESSION MEMBER FOR USE IN SHOWERHEAD ELECTRODE ASSEMBLY
- Publication number 20150243487
- Publication date Aug 27, 2015
- LAM RESEARCH CORPORATION
- Darrell Ehrlich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Processing Devices Having Multi-Port Valve Assemblies
- Publication number 20150047785
- Publication date Feb 19, 2015
- LAM RESEARCH CORPORATION
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING CHAMBER WITH REMOVABLE BODY
- Publication number 20150041062
- Publication date Feb 12, 2015
- LAM RESEARCH CORPORATION
- Michael C. KELLOGG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOVABLE CHAMBER LINER PLASMA CONFINEMENT SCREEN COMBINATION FOR PLA...
- Publication number 20140051254
- Publication date Feb 20, 2014
- LAM RESEARCH CORPORATION
- Danny Brown
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
COMPRESSION MEMBER FOR USE IN SHOWERHEAD ELECTRODE ASSEMBLY
- Publication number 20130299605
- Publication date Nov 14, 2013
- LAM RESEARCH CORPORATION
- Darrell Ehrlich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ACOUSTIC ENERGY UTILIZATION IN PLASMA PROCESSING
- Publication number 20130264309
- Publication date Oct 10, 2013
- Ian J. Kenworthy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOVABLE CHAMBER LINER PLASMA CONFINEMENT SCREEN COMBINATION FOR PLA...
- Publication number 20110287632
- Publication date Nov 24, 2011
- LAM RESEARCH CORPORATION
- Danny Brown
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
QUARTZ GUARD RING CENTERING FEATURES
- Publication number 20110083318
- Publication date Apr 14, 2011
- Dean J. Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REPLACEABLE UPPER CHAMBER PARTS OF PLASMA PROCESSING APPARATUS
- Publication number 20110056626
- Publication date Mar 10, 2011
- LAM RESEARCH CORPORATION
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM SEALING RADIO FREQUENCY (RF) AND LOW FREQUENCY CONDUCTING AC...
- Publication number 20090152958
- Publication date Jun 18, 2009
- LAM RESEARCH CORPORATION
- Danny Brown
- F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information Patent Application
PLASMA PROCESSING CHAMBER WITH GUARD RING FOR UPPER ELECTRODE ASSEMBLY
- Publication number 20090127234
- Publication date May 21, 2009
- LAM RESEARCH CORPORATION
- Dean J. Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Quartz guard ring centering features
- Publication number 20080099120
- Publication date May 1, 2008
- Lam Research Corporation, Fremont, California USA.
- Dean J. Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Quartz guard ring
- Publication number 20080099448
- Publication date May 1, 2008
- LAM RESEARCH CORPORATION
- Dean J. Larson
- H01 - BASIC ELECTRIC ELEMENTS

Daniel A. Brown

Person

Patents Grantslast 30 patents

Plasma processing devices having multi-port valve assemblies

Integrated tool lift

Integrated tool lift

Moving substrate transfer chamber

Chamber with vertical support stem for symmetric conductance and RF...

Chamber with vertical support stem for symmetric conductance and RF...

Compression member for use in showerhead electrode assembly

Replaceable upper chamber parts of plasma processing apparatus

Chamber with vertical support stem for symmetric conductance and RF...

Plasma processing devices having multi-port valve assemblies

Compression member for use in showerhead electrode assembly

Movable chamber liner plasma confinement screen combination for pla...

Replaceable upper chamber parts of plasma processing apparatus

Compression member for use in showerhead electrode assembly

Movable chamber liner plasma confinement screen combination for pla...

Vacuum sealing radio frequency (RF) and low frequency conducting ac...

Quartz guard ring centering features

Plasma processing chamber with guard ring for upper electrode assembly

Quartz guard ring centering features

Quartz guard ring

Patents Applicationslast 30 patents

INTEGRATED TOOL LIFT

LINEAR ARRANGEMENT FOR SUBSTRATE PROCESSING TOOLS

INTEGRATED TOOL LIFT

INTEGRATED TOOL LIFT

MOVING SUBSTRATE TRANSFER CHAMBER

CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF...

CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF...

PLASMA PROCESSING DEVICES HAVING MULTI-PORT VALVE ASSEMBLIES

COMPRESSION MEMBER FOR USE IN SHOWERHEAD ELECTRODE ASSEMBLY

CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF...

PLASMA PROCESSING DEVICES HAVING MULTI-PORT VALVE ASSEMBLIES

REPLACEABLE UPPER CHAMBER PARTS OF PLASMA PROCESSING APPARATUS

COMPRESSION MEMBER FOR USE IN SHOWERHEAD ELECTRODE ASSEMBLY

Plasma Processing Devices Having Multi-Port Valve Assemblies

PLASMA PROCESSING CHAMBER WITH REMOVABLE BODY

MOVABLE CHAMBER LINER PLASMA CONFINEMENT SCREEN COMBINATION FOR PLA...

COMPRESSION MEMBER FOR USE IN SHOWERHEAD ELECTRODE ASSEMBLY

ACOUSTIC ENERGY UTILIZATION IN PLASMA PROCESSING

MOVABLE CHAMBER LINER PLASMA CONFINEMENT SCREEN COMBINATION FOR PLA...

QUARTZ GUARD RING CENTERING FEATURES

REPLACEABLE UPPER CHAMBER PARTS OF PLASMA PROCESSING APPARATUS

VACUUM SEALING RADIO FREQUENCY (RF) AND LOW FREQUENCY CONDUCTING AC...

PLASMA PROCESSING CHAMBER WITH GUARD RING FOR UPPER ELECTRODE ASSEMBLY

Quartz guard ring centering features

Quartz guard ring