Daniel A. Hall

Person

West Newbury, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Chuck for processing semiconductor workpieces at high temperatures
- Patent number 12,046,503
- Issue date Jul 23, 2024
- Applied Materials, Inc.
- Dawei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load port module
- Patent number 11,121,017
- Issue date Sep 14, 2021
- Brooks Automation, Inc.
- Daniel A. Hall
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Force sensing system for substrate lifting apparatus
- Patent number 9,108,322
- Issue date Aug 18, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Richard V. Chisholm
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Load port module
- Patent number 8,821,099
- Issue date Sep 2, 2014
- Brooks Automation, Inc.
- Daniel A. Hall
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Equipment storage for substrate processing apparatus
- Patent number 8,182,192
- Issue date May 22, 2012
- Brooks Automation, Inc.
- Daniel A. Hall
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Equipment storage for substrate processing apparatus
- Patent number 7,762,755
- Issue date Jul 27, 2010
- Brooks Automation, Inc.
- Daniel A. Hall
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus with removable component module
- Patent number 7,607,879
- Issue date Oct 27, 2009
- Brooks Automation, Inc.
- Daniel A. Hall
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
XRAY DIFFRACTION ANGLE VERIFICATION IN AN ION IMPLANTER
- Publication number 20240222070
- Publication date Jul 4, 2024
- Applied Materials, Inc.
- Stephen Krause
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chuck For Processing Semiconductor Workpieces At High Temperatures
- Publication number 20230132307
- Publication date Apr 27, 2023
- Applied Materials, Inc.
- Dawei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND APPARATUS FOR ENHANCED SUBSTRATE HEATING AND RAPID SUBST...
- Publication number 20200381271
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Dawei Sun
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LOAD PORT MODULE
- Publication number 20140369793
- Publication date Dec 18, 2014
- Daniel A. Hall
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
FORCE SENSING SYSTEM FOR SUBSTRATE LIFTING APPARATUS
- Publication number 20140324221
- Publication date Oct 30, 2014
- Richard V. Chisholm
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Equipment Storage for Substrate Processing Apparatus
- Publication number 20110014016
- Publication date Jan 20, 2011
- Brooks Automation, Inc.
- Daniel A. Hall
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Equipment storage for substrate processing apparatus
- Publication number 20070098527
- Publication date May 3, 2007
- Daniel A. Hall
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Load port module
- Publication number 20070009345
- Publication date Jan 11, 2007
- Daniel A. Hall
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Subtrate processing apparatus with removable component module
- Publication number 20060045665
- Publication date Mar 2, 2006
- Daniel A. Hall
- H01 - BASIC ELECTRIC ELEMENTS

Daniel A. Hall

Person

Patents Grantslast 30 patents

Chuck for processing semiconductor workpieces at high temperatures

Load port module

Force sensing system for substrate lifting apparatus

Load port module

Equipment storage for substrate processing apparatus

Equipment storage for substrate processing apparatus

Substrate processing apparatus with removable component module

Patents Applicationslast 30 patents

XRAY DIFFRACTION ANGLE VERIFICATION IN AN ION IMPLANTER

Chuck For Processing Semiconductor Workpieces At High Temperatures

SYSTEM AND APPARATUS FOR ENHANCED SUBSTRATE HEATING AND RAPID SUBST...

LOAD PORT MODULE

FORCE SENSING SYSTEM FOR SUBSTRATE LIFTING APPARATUS

Equipment Storage for Substrate Processing Apparatus

Equipment storage for substrate processing apparatus

Load port module

Subtrate processing apparatus with removable component module