Daniel A. Rothweil

Person

San Diego, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Reliable, modular, production quality narrow-band high rep rate F2...
- Patent number RE38054
- Issue date Apr 1, 2003
- Cymer, Inc.
- Thomas Hofmann
- 372 - Coherent light generators
Information Patent Grant
Reliable, modular, production quality narrow-band high rep rate ArF...
- Patent number 6,330,261
- Issue date Dec 11, 2001
- Cymer, Inc.
- Toshihiko Ishihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High pulse rate pulse power system with liquid cooling
- Patent number 6,240,112
- Issue date May 29, 2001
- Cymer, Inc.
- William N. Partlo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
High pulse rate pulse power system with fast rise time and low current
- Patent number 6,151,346
- Issue date Nov 21, 2000
- Cymer, Inc.
- William N. Partlo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reliable modular production quality narrow-band high REP rate excim...
- Patent number 6,128,323
- Issue date Oct 3, 2000
- Cymer, Inc.
- David W. Myers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
High pulse rate pulse power system with resonant power supply
- Patent number 6,028,872
- Issue date Feb 22, 2000
- Cymer, Inc.
- William N. Partlo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reliable, modular, production quality narrow-band high rep rate F.s...
- Patent number 6,018,537
- Issue date Jan 25, 2000
- Cymer, Inc.
- Thomas Hofmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reliable. modular, production quality narrow-band KRF excimer laser
- Patent number 5,991,324
- Issue date Nov 23, 1999
- Cymer, Inc.
- David S. Knowles
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Excimer laser having power supply with fine digital regulation
- Patent number 5,982,795
- Issue date Nov 9, 1999
- Cymer, Inc.
- Daniel A. Rothweil
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
High pulse rate pulse power system
- Patent number 5,936,988
- Issue date Aug 10, 1999
- Cymer, Inc.
- William N. Partlo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Daniel A. Rothweil

Person

Patents Grantslast 30 patents

Reliable, modular, production quality narrow-band high rep rate F2...

Reliable, modular, production quality narrow-band high rep rate ArF...

High pulse rate pulse power system with liquid cooling

High pulse rate pulse power system with fast rise time and low current

Reliable modular production quality narrow-band high REP rate excim...

High pulse rate pulse power system with resonant power supply

Reliable, modular, production quality narrow-band high rep rate F.s...

Reliable. modular, production quality narrow-band KRF excimer laser

Excimer laser having power supply with fine digital regulation

High pulse rate pulse power system