Daniel A. Tichenor

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Castro Valley, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Condenser optic with sacrificial reflective surface
- Patent number 7,239,443
- Issue date Jul 3, 2007
- EUV LLC
- Daniel A. Tichenor
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Condenser optic with sacrificial reflective surface
- Patent number 7,081,992
- Issue date Jul 25, 2006
- EUV LLC
- Daniel A. Tichenor
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Compensation of flare-induced CD changes EUVL
- Patent number 6,815,129
- Issue date Nov 9, 2004
- EUV LLC
- John E. Bjorkholm
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask-to-wafer alignment system
- Patent number 6,642,995
- Issue date Nov 4, 2003
- EUV LLC
- William C. Sweatt
- G02 - OPTICS
Information Patent Grant
Diffraction spectral filter for use in extreme-UV lithography conde...
- Patent number 6,469,827
- Issue date Oct 22, 2002
- EUV LLC
- William C. Sweatt
- G02 - OPTICS
Information Patent Grant
Projection lithography with distortion compensation using reticle c...
- Patent number 6,229,871
- Issue date May 8, 2001
- EUV LLC
- Daniel A. Tichenor
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet lithography machine
- Patent number 6,031,598
- Issue date Feb 29, 2000
- EUV LLC
- Daniel A. Tichenor
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Condenser optic with sacrificial reflective surface
- Publication number 20060245045
- Publication date Nov 2, 2006
- Daniel A. Tichenor
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Condenser optic with sacrificial reflective surface
- Publication number 20050157383
- Publication date Jul 21, 2005
- Daniel A. Tichenor
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mask-to-wafer alignment system
- Publication number 20030086068
- Publication date May 8, 2003
- William C. Sweatt
- G02 - OPTICS