Daniel B. Richardson

Person

Westminster, MD, US

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer transport apparatus
- Patent number 6,969,227
- Issue date Nov 29, 2005
- Axcolis Technologies, Inc.
- David William Kinnard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transport apparatus
- Patent number 6,877,946
- Issue date Apr 12, 2005
- Axcelis Technologies, Inc.
- David William Kinnard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Actively-cooled distribution plate for reducing reactive gas temper...
- Patent number 6,782,843
- Issue date Aug 31, 2004
- Axcelis Technologies, Inc.
- David W. Kinnard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer transport apparatus
- Patent number 6,663,333
- Issue date Dec 16, 2003
- Axcelis Technologies, Inc.
- David William Kinnard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Actively-cooled distribution plate for reducing reactive gas temper...
- Patent number 6,635,117
- Issue date Oct 21, 2003
- Axcelis Technologies, Inc.
- David W. Kinnard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tunable radiation source providing a VUV wavelength planar illumina...
- Patent number 6,597,003
- Issue date Jul 22, 2003
- Axcelis Technologies, Inc.
- Alan C. Janos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optimized optical system design for endpoint detection
- Patent number 6,547,458
- Issue date Apr 15, 2003
- Axcelis Technologies, Inc.
- Alan C. Janos
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Wafer transport apparatus
- Publication number 20040076505
- Publication date Apr 22, 2004
- David William Kinnard
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Wafer transport apparatus
- Publication number 20040052632
- Publication date Mar 18, 2004
- David William Kinnard
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Actively-cooled distribution plate for reducing reactive gas temper...
- Publication number 20030205328
- Publication date Nov 6, 2003
- David W. Kinnard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Tunable radiation source providing a VUV wavelength planar illumina...
- Publication number 20030015669
- Publication date Jan 23, 2003
- Axcelis Technologies, Inc.
- Alan C. Janos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer transport apparatus
- Publication number 20030012624
- Publication date Jan 16, 2003
- David William Kinnard
- H01 - BASIC ELECTRIC ELEMENTS

Daniel B. Richardson

Person

Patents Grantslast 30 patents

Wafer transport apparatus

Wafer transport apparatus

Actively-cooled distribution plate for reducing reactive gas temper...

Wafer transport apparatus

Actively-cooled distribution plate for reducing reactive gas temper...

Tunable radiation source providing a VUV wavelength planar illumina...

Optimized optical system design for endpoint detection

Patents Applicationslast 30 patents

Wafer transport apparatus

Wafer transport apparatus

Actively-cooled distribution plate for reducing reactive gas temper...

Tunable radiation source providing a VUV wavelength planar illumina...

Wafer transport apparatus