Daniel Babbs

Person

Austin, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 12,206,342
- Issue date Jan 21, 2025
- BROOKS AUTOMATION US, LLC
- Jairo T. Moura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transport apparatus
- Patent number 12,162,698
- Issue date Dec 10, 2024
- BROOKS AUTOMATION US, LLC
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport apparatus with linear bearing
- Patent number 12,142,505
- Issue date Nov 12, 2024
- BROOKS AUTOMATION US, LLC
- Daniel Babbs
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,142,511
- Issue date Nov 12, 2024
- BROOKS AUTOMATION US, LLC
- Alexander Krupyshev
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate transport
- Patent number 11,978,648
- Issue date May 7, 2024
- BROOKS AUTOMATION US, LLC
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transport
- Patent number 11,658,051
- Issue date May 23, 2023
- BROOKS AUTOMATION US, LLC
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport apparatus with linear bearing
- Patent number 11,545,380
- Issue date Jan 3, 2023
- Brooks Automation US LLC
- Daniel Babbs
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate transport apparatus
- Patent number 11,235,935
- Issue date Feb 1, 2022
- Brooks Automation, Inc.
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Side opening unified pod
- Patent number 11,201,070
- Issue date Dec 14, 2021
- Brooks Automation, Inc.
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transport
- Patent number 11,121,015
- Issue date Sep 14, 2021
- Brooks Automation, Inc.
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduced capacity carrier, transport, load port, buffer system
- Patent number 10,679,882
- Issue date Jun 9, 2020
- Brooks Automation, Inc.
- Michael L. Bufano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transport
- Patent number 10,395,959
- Issue date Aug 27, 2019
- Brooks Automation, Inc.
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Side opening unified pod
- Patent number 9,978,623
- Issue date May 22, 2018
- Brooks Automation, Inc.
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduced capacity carrier, transport, load port, buffer system
- Patent number 9,224,628
- Issue date Dec 29, 2015
- Brooks Automation Inc.
- Michael L. Bufano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Side opening unified pod
- Patent number 9,105,673
- Issue date Aug 11, 2015
- Brooks Automation, Inc.
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport system
- Patent number 8,827,618
- Issue date Sep 9, 2014
- Brooks Automation, Inc.
- Daniel Babbs
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Reduced capacity carrier, transport, load port, buffer system
- Patent number 8,328,495
- Issue date Dec 11, 2012
- Brooks Automation, Inc.
- Michael L. Bufano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrier gas system and coupling substrate carrier to a loadport
- Patent number 8,297,319
- Issue date Oct 30, 2012
- Brooks Automation, Inc.
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduced capacity carrier, transport, load port, buffer system
- Patent number 8,272,827
- Issue date Sep 25, 2012
- Michael L. Bufano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduced capacity carrier, transport, load port, buffer system
- Patent number 8,267,634
- Issue date Sep 18, 2012
- Brooks Automation, Inc.
- Michael L. Bufano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chucking system for nano-manufacturing
- Patent number 8,033,815
- Issue date Oct 11, 2011
- Molecular Imprints, Inc.
- Daniel A. Babbs
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Interferometric analysis method for the manufacture of nano-scale d...
- Patent number 7,880,872
- Issue date Feb 1, 2011
- Molecular Imprints, Inc.
- Pawan Kumar Nimmakayala
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Reduced capacity carrier, transport, load port, buffer system
- Patent number 7,798,758
- Issue date Sep 21, 2010
- Brooks Automation, Inc.
- Michael L. Bufano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chucking system for nano-manufacturing
- Patent number 7,798,801
- Issue date Sep 21, 2010
- Molecular Imprints, Inc.
- Daniel A. Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System to transfer a template transfer body between a motion stage...
- Patent number 7,665,981
- Issue date Feb 23, 2010
- Molecular Imprints, Inc.
- Philip D. Schumaker
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of retaining a substrate to a wafer chuck
- Patent number 7,636,999
- Issue date Dec 29, 2009
- Molecular Imprints, Inc.
- Byung-Jin Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of separating a mold from a solidified layer disposed on a s...
- Patent number 7,635,445
- Issue date Dec 22, 2009
- Molecular Imprints, Inc.
- Byung-Jin Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interferometric analysis method for the manufacture of nano-scale d...
- Patent number 7,630,067
- Issue date Dec 8, 2009
- Molecular Imprints, Inc.
- Pawan Kumar Nimmakayala
- G01 - MEASURING TESTING
Information Patent Grant
Method of creating a turbulent flow of fluid between a mold and a s...
- Patent number 7,531,025
- Issue date May 12, 2009
- Molecular Imprints, Inc.
- Ian M. McMackin
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Interferometric analysis for the manufacture of nano-scale devices
- Patent number 7,292,326
- Issue date Nov 6, 2007
- Molecular Imprints, Inc.
- Pawan Kumar Nimmakayala
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250069939
- Publication date Feb 27, 2025
- BROOKS AUTOMATION US, LLC
- Alexander Krupyshev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORT
- Publication number 20230377924
- Publication date Nov 23, 2023
- BOOKS AUTOMATION US, LLC
- Daniel BABBS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230143307
- Publication date May 11, 2023
- BROOKS AUTOMATION US, LLC
- Jairo T. Moura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPORT APPARATUS WITH LINEAR BEARING AND METHOD THEREFOR
- Publication number 20230129289
- Publication date Apr 27, 2023
- BROOKS AUTOMATION US, LLC
- Daniel BABBS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS
- Publication number 20220153535
- Publication date May 19, 2022
- BROOKS AUTOMATION US, LLC
- Daniel BABBS
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE TRANSPORT
- Publication number 20210407836
- Publication date Dec 30, 2021
- BOOKS AUTOMATION US, LLC
- Daniel BABBS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS
- Publication number 20210229934
- Publication date Jul 29, 2021
- Brooks Automation, Inc.
- Daniel BABBS
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESS APPARATUS
- Publication number 20200395232
- Publication date Dec 17, 2020
- Brooks Automation, Inc.
- Alexander Krupyshev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORT
- Publication number 20200161153
- Publication date May 21, 2020
- Brooks Automation, Inc.
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPORT APPARATUS WITH LINEAR BEARING AND METHOD THEREFOR
- Publication number 20200144087
- Publication date May 7, 2020
- Brooks Automation, Inc.
- Daniel BABBS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SIDE OPENING UNIFIED POD
- Publication number 20180269094
- Publication date Sep 20, 2018
- Brooks Automation, Inc.
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20160329234
- Publication date Nov 10, 2016
- Brooks Automation, Inc.
- Alexander Krupyshev
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM
- Publication number 20160111308
- Publication date Apr 21, 2016
- Brooks Automation, Inc.
- Michael L. Bufano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SIDE OPENING UNIFIED POD
- Publication number 20160035608
- Publication date Feb 4, 2016
- Brooks Automation, Inc.
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150013910
- Publication date Jan 15, 2015
- Alexander Krupyshev
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE TRANSPORT
- Publication number 20140202921
- Publication date Jul 24, 2014
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPORT SYSTEM
- Publication number 20130333174
- Publication date Dec 19, 2013
- Brooks Automation, Inc.
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM
- Publication number 20130089396
- Publication date Apr 11, 2013
- Brooks Automation, Inc.
- Michael L. Bufano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chucking System for Nano-Manufacturing
- Publication number 20110014314
- Publication date Jan 20, 2011
- Molecular Imprints, Inc.
- Daniel A. Babbs
- B82 - NANO-TECHNOLOGY
Information Patent Application
REDUCED CAPACITY CARRIER, TRANSPORT LOAD PORT, BUFFER SYSTEM
- Publication number 20110008136
- Publication date Jan 13, 2011
- Brooks Automation, Inc.
- Michael L. Bufano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chucking System for Nano-Manufacturing
- Publication number 20100314803
- Publication date Dec 16, 2010
- Molecular Imprints, Inc.
- Daniel A. Babbs
- B82 - NANO-TECHNOLOGY
Information Patent Application
REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM
- Publication number 20100054897
- Publication date Mar 4, 2010
- Brooks Automation Inc.
- Michael L. Bufano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Interferometric Analysis Method for the Manufacture of Nano-Scale D...
- Publication number 20100038827
- Publication date Feb 18, 2010
- Molecular Imprints, Inc.
- Pawan Kumar Nimmakayala
- G01 - MEASURING TESTING
Information Patent Application
SIDE OPENING UNIFIED POD
- Publication number 20090129897
- Publication date May 21, 2009
- Brooks Automation, Inc.
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARRIER GAS SYSTEM AND COUPLING SUBSTRATE CARRIER TO A LOADPORT
- Publication number 20080107506
- Publication date May 8, 2008
- Brooks Automation, Inc.
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reduced capacity carrier, transport, load port, buffer system
- Publication number 20080107507
- Publication date May 8, 2008
- Michael L. Bufano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reduced capacity carrier, transport, load port, buffer system
- Publication number 20080080963
- Publication date Apr 3, 2008
- Michael L. Bufano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reduced capacity carrier, transport, load port, buffer system
- Publication number 20080063496
- Publication date Mar 13, 2008
- Michael L. Bufano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM
- Publication number 20070201967
- Publication date Aug 30, 2007
- Michael L. Bufano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reduced capacity carrier, transport, load port, buffer system
- Publication number 20070189880
- Publication date Aug 16, 2007
- Michael L. Bufano
- H01 - BASIC ELECTRIC ELEMENTS

Daniel Babbs

Person

Patents Grantslast 30 patents

Substrate processing apparatus

Substrate transport apparatus

Transport apparatus with linear bearing

Substrate processing apparatus

Substrate transport

Substrate transport

Transport apparatus with linear bearing

Substrate transport apparatus

Side opening unified pod

Substrate transport

Reduced capacity carrier, transport, load port, buffer system

Substrate transport

Side opening unified pod

Reduced capacity carrier, transport, load port, buffer system

Side opening unified pod

Transport system

Reduced capacity carrier, transport, load port, buffer system

Carrier gas system and coupling substrate carrier to a loadport

Reduced capacity carrier, transport, load port, buffer system

Reduced capacity carrier, transport, load port, buffer system

Chucking system for nano-manufacturing

Interferometric analysis method for the manufacture of nano-scale d...

Reduced capacity carrier, transport, load port, buffer system

Chucking system for nano-manufacturing

System to transfer a template transfer body between a motion stage...

Method of retaining a substrate to a wafer chuck

Method of separating a mold from a solidified layer disposed on a s...

Interferometric analysis method for the manufacture of nano-scale d...

Method of creating a turbulent flow of fluid between a mold and a s...

Interferometric analysis for the manufacture of nano-scale devices

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TRANSPORT

SUBSTRATE PROCESSING APPARATUS

TRANSPORT APPARATUS WITH LINEAR BEARING AND METHOD THEREFOR

SUBSTRATE TRANSPORT APPARATUS

SUBSTRATE TRANSPORT

SUBSTRATE TRANSPORT APPARATUS

SUBSTRATE PROCESS APPARATUS

SUBSTRATE TRANSPORT

TRANSPORT APPARATUS WITH LINEAR BEARING AND METHOD THEREFOR

SIDE OPENING UNIFIED POD

SUBSTRATE PROCESSING APPARATUS

REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM

SIDE OPENING UNIFIED POD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TRANSPORT

TRANSPORT SYSTEM

REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM

Chucking System for Nano-Manufacturing

REDUCED CAPACITY CARRIER, TRANSPORT LOAD PORT, BUFFER SYSTEM

Chucking System for Nano-Manufacturing

REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM

Interferometric Analysis Method for the Manufacture of Nano-Scale D...

SIDE OPENING UNIFIED POD

CARRIER GAS SYSTEM AND COUPLING SUBSTRATE CARRIER TO A LOADPORT

Reduced capacity carrier, transport, load port, buffer system

Reduced capacity carrier, transport, load port, buffer system

Reduced capacity carrier, transport, load port, buffer system

REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM

Reduced capacity carrier, transport, load port, buffer system