Daniel Benz

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Winnenden, DE

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Patents Grantslast 30 patents

Information Patent Grant
Microlithographic projection exposure apparatus
- Patent number 9,535,336
- Issue date Jan 3, 2017
- Carl Zeiss SMT GmbH
- Sascha Bleidistel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system of a microlithographic projection exposure appa...
- Patent number 9,523,922
- Issue date Dec 20, 2016
- Carl Zeiss SMT GmbH
- Florian Bach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system of a microlithographic projection exposure appa...
- Patent number 8,797,507
- Issue date Aug 5, 2014
- Carl Zeiss SMT GmbH
- Florian Bach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microlithographic projection exposure apparatus
- Patent number 8,767,176
- Issue date Jul 1, 2014
- Carl Zeiss SMT GmbH
- Sascha Bleidistel
- G02 - OPTICS
Information Patent Grant
Mirror for guiding a radiation bundle
- Patent number 8,717,531
- Issue date May 6, 2014
- Carl Zeiss SMT GmbH
- Severin Waldis
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
- Publication number 20140333912
- Publication date Nov 13, 2014
- Carl Zeiss SMT GMBH
- Sascha Bleidistel
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
- Publication number 20140307239
- Publication date Oct 16, 2014
- Florian Bach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
- Publication number 20110181852
- Publication date Jul 28, 2011
- Carl Zeiss SMT GMBH
- Sascha Bleidistel
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
- Publication number 20110181850
- Publication date Jul 28, 2011
- Carl Zeiss SMT GMBH
- Florian Bach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MIRROR FOR GUIDING A RADIATION BUNDLE
- Publication number 20100261120
- Publication date Oct 14, 2010
- Carl Zeiss SMT AG
- Severin Waldis
- G02 - OPTICS