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Daniel BRIEN
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Patents Grants
last 30 patents
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Patent Grant
Apparatus for processing a wafer, and method of controlling such an...
Patent number
12,217,980
Issue date
Feb 4, 2025
Lam Research AG
Daniel Brien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and radiant heating plate for processing wafer-shaped art...
Patent number
10,312,117
Issue date
Jun 4, 2019
Lam Research AG
Hongbo Si
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
APPARATUS FOR PROCESSING A WAFER, AND METHOD OF CONTROLLING SUCH AN...
Publication number
20220084848
Publication date
Mar 17, 2022
LAM RESEARCH AG
Daniel BRIEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND RADIANT HEATING PLATE FOR PROCESSING WAFER-SHAPED ART...
Publication number
20180047596
Publication date
Feb 15, 2018
LAM RESEARCH AG
Hongbo SI
H01 - BASIC ELECTRIC ELEMENTS