Daniel Damjanovic

Follow

Person

Sherwood, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Oxidizing treatment of aluminum nitride films in semiconductor devi...
- Patent number 10,651,080
- Issue date May 12, 2020
- Lam Research Corporation
- Meliha Gozde Rainville
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for formation of low-k aluminum-containing etch stop films
- Patent number 9,633,896
- Issue date Apr 25, 2017
- Lam Research Corporation
- Daniel Damjanovic
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
OXIDIZING TREATMENT OF ALUMINUM NITRIDE FILMS IN SEMICONDUCTOR DEVI...
- Publication number 20170309514
- Publication date Oct 26, 2017
- LAM RESEARCH CORPORATION
- Meliha Gozde Rainville
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FORMATION OF LOW-K ALUMINUM-CONTAINING ETCH STOP FILMS
- Publication number 20170103914
- Publication date Apr 13, 2017
- LAM RESEARCH CORPORATION
- Daniel Damjanovic
- H01 - BASIC ELECTRIC ELEMENTS