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Daniel E. Glenn
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Mountain View, CA, US
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last 30 patents
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Patent Grant
In situ technique for monitoring and controlling a process of chemi...
Patent number
6,010,538
Issue date
Jan 4, 2000
Luxtron Corporation
Mei H. Sun
G05 - CONTROLLING REGULATING
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Patent Grant
Processing endpoint detecting technique and detector structure usin...
Patent number
5,362,969
Issue date
Nov 8, 1994
Luxtron Corporation
Daniel E. Glenn
B24 - GRINDING POLISHING