Daniel F. Downey

Person

Gloucester, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods for forming thin film layers by simultaneous doping and sin...
- Patent number 7,163,901
- Issue date Jan 16, 2007
- Varian Semiconductor Equipment Associates, Inc.
- Daniel F. Downey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming low resistivity, ultrashallow junctions with lo...
- Patent number 7,135,423
- Issue date Nov 14, 2006
- Varian Semiconductor Equipment Associates, Inc.
- Daniel F. Downey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Athermal annealing with rapid thermal annealing system and method
- Patent number 7,026,229
- Issue date Apr 11, 2006
- Vartan Semiconductor Equipment Associates, Inc.
- Daniel F. Downey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for chemical formation of thin film layers using short-time...
- Patent number 6,878,415
- Issue date Apr 12, 2005
- Varian Semiconductor Equipment Associates, Inc.
- Daniel F. Downey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming shallow junctions in semiconductor wafers using...
- Patent number 6,087,247
- Issue date Jul 11, 2000
- Varian Semiconductor Equipment Associates, Inc.
- Daniel F. Downey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming shallow junctions in semiconductor wafers
- Patent number 6,069,062
- Issue date May 30, 2000
- Varian Semiconductor Equipment Associates, Inc.
- Daniel F. Downey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for reflow of phosphosilicate glass
- Patent number 4,474,831
- Issue date Oct 2, 1984
- Varian Associates, Inc.
- Daniel F. Downey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
End point detection method for physical etching process
- Patent number 4,358,338
- Issue date Nov 9, 1982
- Varian Associates, Inc.
- Daniel F. Downey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Methods and systems for dopant profiling
- Publication number 20050260838
- Publication date Nov 24, 2005
- Varian Semiconductor Equipment Associates, Inc.
- Daniel F. Downey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and methods for junction formation using optical illumina...
- Publication number 20040235281
- Publication date Nov 25, 2004
- Daniel F. Downey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for forming low resistivity, ultrashallow junctions with lo...
- Publication number 20030211670
- Publication date Nov 13, 2003
- Varian Semiconductor Equipment Associates, Inc.
- Daniel F. Downey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for chemical formation of thin film layers using short-time...
- Publication number 20030194509
- Publication date Oct 16, 2003
- Varian Semiconductor Equipment Associates, Inc.
- Daniel F. Downey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dopant diffusion and activation control with athermal annealing
- Publication number 20030186519
- Publication date Oct 2, 2003
- Daniel F. Downey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for forming thin film layers by simultaneous doping and sin...
- Publication number 20030181068
- Publication date Sep 25, 2003
- Varian Semiconductor Equipment Associates, Inc.
- Daniel F. Downey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Athermal annealing with rapid thermal annealing system and method
- Publication number 20030157813
- Publication date Aug 21, 2003
- Daniel F. Downey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for forming ultrashallow junctions with low sheet resistance
- Publication number 20020187614
- Publication date Dec 12, 2002
- Daniel F. Downey
- H01 - BASIC ELECTRIC ELEMENTS

Daniel F. Downey

Person

Patents Grantslast 30 patents

Methods for forming thin film layers by simultaneous doping and sin...

Methods for forming low resistivity, ultrashallow junctions with lo...

Athermal annealing with rapid thermal annealing system and method

Methods for chemical formation of thin film layers using short-time...

Method for forming shallow junctions in semiconductor wafers using...

Methods for forming shallow junctions in semiconductor wafers

Method for reflow of phosphosilicate glass

End point detection method for physical etching process

Patents Applicationslast 30 patents

Methods and systems for dopant profiling

Apparatus and methods for junction formation using optical illumina...

Methods for forming low resistivity, ultrashallow junctions with lo...

Methods for chemical formation of thin film layers using short-time...

Dopant diffusion and activation control with athermal annealing

Methods for forming thin film layers by simultaneous doping and sin...

Athermal annealing with rapid thermal annealing system and method

Methods for forming ultrashallow junctions with low sheet resistance