Daniel Fischer

Person

Dresden, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam system, method of operating a charged particl...
- Patent number 12,293,895
- Issue date May 6, 2025
- Carl Zeiss SMT GmbH
- Eugen Foca
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system, method of operating a charged particl...
- Patent number 11,810,749
- Issue date Nov 7, 2023
- Carl Zeiss SMT GmbH
- Eugen Foca
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of operating a particle beam system, particle beam system an...
- Patent number 11,087,957
- Issue date Aug 10, 2021
- Carl Zeiss SMT GmbH
- Daniel Fischer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Insitu tool health and recipe quality monitoring on a CDSEM
- Patent number 10,185,312
- Issue date Jan 22, 2019
- GLOBALFOUNDRIES Inc.
- Daniel Fischer
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method for in-die overlay control using FEOL dummy fill layer
- Patent number 10,115,621
- Issue date Oct 30, 2018
- GLOBALFOUNDRIES Inc.
- Peter Moll
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inline residual layer detection and characterization post via post...
- Patent number 9,171,765
- Issue date Oct 27, 2015
- GLOBALFOUNDRIES Inc.
- Daniel Fischer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Detection of particle contamination on wafers
- Patent number 9,091,667
- Issue date Jul 28, 2015
- GLOBALFOUNDRIES Inc.
- Adam Michal Urbanowicz
- G01 - MEASURING TESTING
Information Patent Grant
Method of depositing protective structures
- Patent number 9,006,681
- Issue date Apr 14, 2015
- Carl Zeiss Microscopy GmbH
- Heinz Wanzenboeck
- G01 - MEASURING TESTING
Information Patent Grant
Repair of damaged surface areas of sensitive low-K dielectrics of m...
- Patent number 8,575,041
- Issue date Nov 5, 2013
- GLOBALFOUNDRIES Inc.
- Matthias Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Re-establishing surface characteristics of sensitive low-k dielectr...
- Patent number 8,440,579
- Issue date May 14, 2013
- GLOBALFOUNDRIES Inc.
- Matthias Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for quantitative inline material characterization...
- Patent number 8,423,320
- Issue date Apr 16, 2013
- Advanced Micro Devices, Inc.
- Matthias Schaller
- G01 - MEASURING TESTING
Information Patent Grant
Establishing a hydrophobic surface of sensitive low-k dielectrics o...
- Patent number 8,399,358
- Issue date Mar 19, 2013
- GLOBALFOUNDRIES, INC.
- Daniel Fischer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of reducing erosion of a metal cap layer during via patterni...
- Patent number 8,338,293
- Issue date Dec 25, 2012
- Advanced Micro Devies, Inc.
- Christin Bartsch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of depositing protective structures
- Patent number 8,143,594
- Issue date Mar 27, 2012
- Heinz Wanzenboeck
- G01 - MEASURING TESTING
Information Patent Grant
Method for passivating exposed copper surfaces in a metallization l...
- Patent number 8,110,498
- Issue date Feb 7, 2012
- Advanced Micro Devices, Inc.
- Matthias Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High yield plasma etch process for interlayer dielectrics
- Patent number 8,062,982
- Issue date Nov 22, 2011
- Advanced Micro Devices, Inc.
- Daniel Fischer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of reducing erosion of a metal cap layer during via patterni...
- Patent number 7,986,040
- Issue date Jul 26, 2011
- Advanced Micro Devices, Inc.
- Christin Bartsch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for structuring of silicon substrates for microsystem techno...
- Patent number 7,498,266
- Issue date Mar 3, 2009
- Technische Universitát Dresden
- Karola Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR IMAGING WITH A SCANNING ELECTRON MICROSCOPE AND SCANNING...
- Publication number 20240290574
- Publication date Aug 29, 2024
- Carl Zeiss SMT GMBH
- Daniel Fischer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM, METHOD OF OPERATING A CHARGED PARTICL...
- Publication number 20240038482
- Publication date Feb 1, 2024
- Carl Zeiss SMT GMBH
- Eugen Foca
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM, METHOD OF OPERATING A CHARGED PARTICL...
- Publication number 20230178327
- Publication date Jun 8, 2023
- Carl Zeiss SMT GMBH
- Eugen Foca
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF OPERATING A PARTICLE BEAM SYSTEM, PARTICLE BEAM SYSTEM AN...
- Publication number 20200234913
- Publication date Jul 23, 2020
- Carl Zeiss SMT GMBH
- Daniel Fischer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSITU TOOL HEALTH AND RECIPE QUALITY MONITORING ON A CDSEM
- Publication number 20180217584
- Publication date Aug 2, 2018
- GLOBALFOUNDRIES INC.
- Daniel Fischer
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD FOR IN-DIE OVERLAY CONTROL USING FEOL DUMMY FILL LAYER
- Publication number 20170330782
- Publication date Nov 16, 2017
- GLOBALFOUNDRIES INC.
- Peter MOLL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INLINE RESIDUAL LAYER DETECTION AND CHARACTERIZATION POST VIA POST...
- Publication number 20150243568
- Publication date Aug 27, 2015
- GLOBALFOUNDRIES INC.
- Daniel FISCHER
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DETECTION OF PARTICLE CONTAMINATION ON WAFERS
- Publication number 20150115153
- Publication date Apr 30, 2015
- GLOBALFOUNDRIES INC.
- Adam Michal Urbanowicz
- G01 - MEASURING TESTING
Information Patent Application
Method of Depositing Protective Structures
- Publication number 20140191126
- Publication date Jul 10, 2014
- CARL ZEISS MICROSCOPY GMBH
- Heinz Wanzenboeck
- G01 - MEASURING TESTING
Information Patent Application
Repair of Damaged Surface Areas of Sensitive Low-K Dielectrics of M...
- Publication number 20130072018
- Publication date Mar 21, 2013
- GLOBALFOUNDRIES INC.
- Matthias Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Depositing Protective Structures
- Publication number 20120187291
- Publication date Jul 26, 2012
- CARL ZEISS NTS GMBH
- Heinz Wanzenboeck
- G01 - MEASURING TESTING
Information Patent Application
Re-Establishing Surface Characteristics of Sensitive Low-K Dielectr...
- Publication number 20120049383
- Publication date Mar 1, 2012
- GLOBALFOUNDRIES INC.
- Matthias Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF REDUCING EROSION OF A METAL CAP LAYER DURING VIA PATTERNI...
- Publication number 20120003832
- Publication date Jan 5, 2012
- Advanced Micro Devices, Inc.
- Christin Bartsch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ESTABLISHING A HYDROPHOBIC SURFACE OF SENSITIVE LOW-K DIELECTRICS O...
- Publication number 20100304566
- Publication date Dec 2, 2010
- Daniel Fischer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RE-ESTABLISHING A HYDROPHOBIC SURFACE OF SENSITIVE LOW-K DIELECTRIC...
- Publication number 20100301494
- Publication date Dec 2, 2010
- Matthias Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of depositing protective structures
- Publication number 20100276607
- Publication date Nov 4, 2010
- Carl Zeiss NTS GmbH
- Heinz Wanzenboeck
- G01 - MEASURING TESTING
Information Patent Application
MATERIAL STRIPPING IN SEMICONDUCTOR DEVICES BY EVAPORATION
- Publication number 20100248498
- Publication date Sep 30, 2010
- Petra Hetzer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PASSIVATING EXPOSED COPPER SURFACES IN A METALLIZATION L...
- Publication number 20100081277
- Publication date Apr 1, 2010
- Matthias Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR QUANTITATIVE INLINE MATERIAL CHARACTERIZATION...
- Publication number 20090319196
- Publication date Dec 24, 2009
- Matthias Schaller
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF REDUCING EROSION OF A METAL CAP LAYER DURING VIA PATTERNI...
- Publication number 20090273086
- Publication date Nov 5, 2009
- Christin Bartsch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH YIELD PLASMA ETCH PROCESS FOR INTERLAYER DIELECTRICS
- Publication number 20080202685
- Publication date Aug 28, 2008
- Daniel Fischer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Silicon substrate comprising positive etching profiles with a defin...
- Publication number 20060219654
- Publication date Oct 5, 2006
- Karola Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for structuring of silicon substrates for microsystem techno...
- Publication number 20060099811
- Publication date May 11, 2006
- Karola Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Daniel Fischer

Person

Patents Grantslast 30 patents

Charged particle beam system, method of operating a charged particl...

Charged particle beam system, method of operating a charged particl...

Method of operating a particle beam system, particle beam system an...

Insitu tool health and recipe quality monitoring on a CDSEM

Method for in-die overlay control using FEOL dummy fill layer

Inline residual layer detection and characterization post via post...

Detection of particle contamination on wafers

Method of depositing protective structures

Repair of damaged surface areas of sensitive low-K dielectrics of m...

Re-establishing surface characteristics of sensitive low-k dielectr...

Method and system for quantitative inline material characterization...

Establishing a hydrophobic surface of sensitive low-k dielectrics o...

Method of reducing erosion of a metal cap layer during via patterni...

Method of depositing protective structures

Method for passivating exposed copper surfaces in a metallization l...

High yield plasma etch process for interlayer dielectrics

Method of reducing erosion of a metal cap layer during via patterni...

Method for structuring of silicon substrates for microsystem techno...

Patents Applicationslast 30 patents

METHOD FOR IMAGING WITH A SCANNING ELECTRON MICROSCOPE AND SCANNING...

CHARGED PARTICLE BEAM SYSTEM, METHOD OF OPERATING A CHARGED PARTICL...

CHARGED PARTICLE BEAM SYSTEM, METHOD OF OPERATING A CHARGED PARTICL...

METHOD OF OPERATING A PARTICLE BEAM SYSTEM, PARTICLE BEAM SYSTEM AN...

INSITU TOOL HEALTH AND RECIPE QUALITY MONITORING ON A CDSEM

METHOD FOR IN-DIE OVERLAY CONTROL USING FEOL DUMMY FILL LAYER

INLINE RESIDUAL LAYER DETECTION AND CHARACTERIZATION POST VIA POST...

DETECTION OF PARTICLE CONTAMINATION ON WAFERS

Method of Depositing Protective Structures

Repair of Damaged Surface Areas of Sensitive Low-K Dielectrics of M...

Method of Depositing Protective Structures

Re-Establishing Surface Characteristics of Sensitive Low-K Dielectr...

METHOD OF REDUCING EROSION OF A METAL CAP LAYER DURING VIA PATTERNI...

ESTABLISHING A HYDROPHOBIC SURFACE OF SENSITIVE LOW-K DIELECTRICS O...

RE-ESTABLISHING A HYDROPHOBIC SURFACE OF SENSITIVE LOW-K DIELECTRIC...

Method of depositing protective structures

MATERIAL STRIPPING IN SEMICONDUCTOR DEVICES BY EVAPORATION

METHOD FOR PASSIVATING EXPOSED COPPER SURFACES IN A METALLIZATION L...

METHOD AND SYSTEM FOR QUANTITATIVE INLINE MATERIAL CHARACTERIZATION...

METHOD OF REDUCING EROSION OF A METAL CAP LAYER DURING VIA PATTERNI...

HIGH YIELD PLASMA ETCH PROCESS FOR INTERLAYER DIELECTRICS

Silicon substrate comprising positive etching profiles with a defin...

Method for structuring of silicon substrates for microsystem techno...