Daniel Galburt

Person

Norwalk, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Patterning device support, lithographic apparatus, and method of co...
- Patent number 9,977,351
- Issue date May 22, 2018
- ASML Holding N.V.
- Earl William Ebert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning device support, lithographic apparatus, and method of co...
- Patent number 9,766,557
- Issue date Sep 19, 2017
- ASML Holding N.V.
- Earl William Ebert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle cooling system in a lithographic apparatus
- Patent number 9,632,434
- Issue date Apr 25, 2017
- ASML Holding N.V.
- Earl William Ebert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning device support, lithographic apparatus, and method of co...
- Patent number 9,632,433
- Issue date Apr 25, 2017
- ASML Holding N.V.
- Earl William Ebert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid gauge proximity sensor and method of operating same using a m...
- Patent number RE42650
- Issue date Aug 30, 2011
- ASML Holding N.V.
- Daniel N. Galburt
- 073 - Measuring and testing
Information Patent Grant
Method and system for operating an air gauge at programmable or con...
- Patent number 7,797,985
- Issue date Sep 21, 2010
- ASML Holding N.V.
- Daniel N. Galburt
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for operating an air gauge at programmable or con...
- Patent number 7,437,911
- Issue date Oct 21, 2008
- ASML Holding N.V.
- Daniel N. Galburt
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for improved trajectory planning and execution
- Patent number 7,389,155
- Issue date Jun 17, 2008
- ASML Holding N.V.
- Daniel Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Levitated reticle-masking blade stage
- Patent number 7,372,548
- Issue date May 13, 2008
- ASML Holding N.V.
- Frederick M. Carter
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Lithographic apparatus and device manufacturing method utilizing a...
- Patent number 7,369,214
- Issue date May 6, 2008
- ASML Holding N.V.
- Daniel N. Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Drive for reticle-masking blade stage
- Patent number 7,359,037
- Issue date Apr 15, 2008
- ASML Hoding N.V.
- Frederick M. Carter
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
System and method for patterning a flexible substrate in a lithogra...
- Patent number 7,292,308
- Issue date Nov 6, 2007
- ASML Holding N.V.
- Daniel N. Galburt
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Patterned mask holding device and method using two holding systems
- Patent number 7,196,775
- Issue date Mar 27, 2007
- ASML Holding N.V.
- Daniel N. Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Actuator coil cooling system
- Patent number 7,176,593
- Issue date Feb 13, 2007
- ASML Holding N.V.
- Daniel N. Galburt
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Lithographic tool with dual isolation system and method for configu...
- Patent number 7,164,463
- Issue date Jan 16, 2007
- ASML Holding N.V.
- Daniel N. Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic tool with dual isolation system and method for configu...
- Patent number 7,158,213
- Issue date Jan 2, 2007
- ASML Holding N.V.
- Daniel N. Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid gauge proximity sensor and method of operating same using a m...
- Patent number 7,134,321
- Issue date Nov 14, 2006
- ASML Holding N.V.
- Daniel N. Galburt
- G01 - MEASURING TESTING
Information Patent Grant
High-resolution gas gauge proximity sensor
- Patent number 7,124,624
- Issue date Oct 24, 2006
- ASML Holding N.V.
- Boguslaw F. Gajdeczko
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for cooling a reticle during lithographic expo...
- Patent number 7,105,836
- Issue date Sep 12, 2006
- ASML Holding N.V.
- Santiago del Puerto
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Flexure-supported split reaction mass
- Patent number 7,075,623
- Issue date Jul 11, 2006
- ASML Holding N.V.
- Daniel N Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System to increase throughput in a dual substrate stage double expo...
- Patent number 7,053,990
- Issue date May 30, 2006
- ASML Holding N.V.
- Daniel N. Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method to increase throughput in a dual substrate stage double expo...
- Patent number 7,050,156
- Issue date May 23, 2006
- ASML Holding N.V.
- Daniel N. Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Removable reticle window and support frame using magnetic force
- Patent number 7,042,554
- Issue date May 9, 2006
- ASML Holding N.V.
- Daniel N. Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gas gauge proximity sensor with a modulated gas flow
- Patent number 7,021,121
- Issue date Apr 4, 2006
- ASML Holding N.V.
- Earl W. Ebert
- G01 - MEASURING TESTING
Information Patent Grant
High-resolution gas gauge proximity sensor
- Patent number 7,010,958
- Issue date Mar 14, 2006
- ASML Holding N.V.
- Boguslaw F. Gajdeczko
- G01 - MEASURING TESTING
Information Patent Grant
Method, system, and apparatus for management of reaction loads in a...
- Patent number 6,989,889
- Issue date Jan 24, 2006
- ASML Holding N.V.
- Daniel N. Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System to increase throughput in a dual substrate stage double expo...
- Patent number 6,965,427
- Issue date Nov 15, 2005
- ASML Holding N.V.
- Daniel Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System, method, and apparatus for a magnetically levitated and driv...
- Patent number 6,950,175
- Issue date Sep 27, 2005
- ASML Holding N.V.
- Daniel N. Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Actuator coil cooling system
- Patent number 6,946,761
- Issue date Sep 20, 2005
- ASML Holding, N.V.
- Daniel N. Galburt
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Removable reticle window and support frame using magnetic force
- Patent number 6,912,043
- Issue date Jun 28, 2005
- ASML Holding, N.V.
- Daniel N. Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Patterning Device Support, Lithographic Apparatus, And Method Of Co...
- Publication number 20170307986
- Publication date Oct 26, 2017
- ASML Holding N.V.
- Earl William EBERT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Patterning Device Support, Lithographic Apparatus, And Method Of Co...
- Publication number 20170160652
- Publication date Jun 8, 2017
- ASML Holding N.V.
- Earl William EBERT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Patterning Device Support, Lithographic Apparatus, And Method Of Co...
- Publication number 20150301456
- Publication date Oct 22, 2015
- ASML Holding N.V.
- Earl William EBERT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Reticle Cooling System In A Lithographic Apparatus
- Publication number 20150241796
- Publication date Aug 27, 2015
- ASML Holding N.V.
- Earl William EBERT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and System for Operating an Air Gauge at Programmable or Con...
- Publication number 20090000354
- Publication date Jan 1, 2009
- ASML Holding N.V.
- Daniel N. GALBURT
- G01 - MEASURING TESTING
Information Patent Application
Lithographic apparatus and device manufacturing method utilizing a...
- Publication number 20070035714
- Publication date Feb 15, 2007
- ASML Holding N.V.
- Daniel N. Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and system for operating an air gauge at programmable or con...
- Publication number 20060123888
- Publication date Jun 15, 2006
- ASML Holding N.V.
- Daniel N. Galburt
- G01 - MEASURING TESTING
Information Patent Application
Lithographic tool with dual isolation system and method for configu...
- Publication number 20060092394
- Publication date May 4, 2006
- Daniel N. Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Patterned mask holding device and method using two holding systems
- Publication number 20060038973
- Publication date Feb 23, 2006
- ASML Holding N.V.
- Daniel N. Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Levitated reticle-masking blade stage
- Publication number 20060023195
- Publication date Feb 2, 2006
- ASML Holding N.V.
- Frederick M. Carter
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Fluid gauge proximity sensor and method of operating same using a m...
- Publication number 20060016247
- Publication date Jan 26, 2006
- ASML Holding N.V.
- Daniel N. Galburt
- G01 - MEASURING TESTING
Information Patent Application
Gas gauge proximity sensor with a modulated gas flow
- Publication number 20050274173
- Publication date Dec 15, 2005
- ASML Holding N.V.
- Earl W. Ebert
- G01 - MEASURING TESTING
Information Patent Application
High-resolution gas gauge proximity sensor
- Publication number 20050268698
- Publication date Dec 8, 2005
- ASML Holding N.V.
- Boguslaw F. Gajdeczko
- G05 - CONTROLLING REGULATING
Information Patent Application
System to increase throughput in a dual substrate stage double expo...
- Publication number 20050248747
- Publication date Nov 10, 2005
- ASML Holding N.V.
- Daniel Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Actuator coil cooling system
- Publication number 20050231048
- Publication date Oct 20, 2005
- ASML Holding, N.V.
- Daniel N. Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Removable reticle window and support frame using magnetic force
- Publication number 20050231707
- Publication date Oct 20, 2005
- ASML Holding N.V.
- Daniel N. Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System and method for patterning a flexible substrate in a lithogra...
- Publication number 20050211919
- Publication date Sep 29, 2005
- ASML Holding N.V.
- Daniel N. Galburt
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Levitated and driven reticle-masking blade stage
- Publication number 20050200830
- Publication date Sep 15, 2005
- ASML Holding N.V.
- Frederick M. Carter
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method, system, and apparatus for management of reaction loads in a...
- Publication number 20050185163
- Publication date Aug 25, 2005
- Daniel N. Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System to increase throughput in a dual substrate stage double expo...
- Publication number 20050162636
- Publication date Jul 28, 2005
- ASML Holding N.V.
- Daniel Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Flexure-supported split reaction mass
- Publication number 20050103967
- Publication date May 19, 2005
- ASML Holding N.V.
- Daniel N. Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and system for improved trajectory planning and execution
- Publication number 20050077484
- Publication date Apr 14, 2005
- Daniel Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System to increase throughput in a dual substrate stage double expo...
- Publication number 20040257551
- Publication date Dec 23, 2004
- Daniel N. Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System and method to increase throughput in a dual substrate stage...
- Publication number 20040239902
- Publication date Dec 2, 2004
- ASML Holding N.V.
- Daniel Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System, method, and apparatus for a magnetically levitated and driv...
- Publication number 20040239283
- Publication date Dec 2, 2004
- ASML Holding N.V.
- Daniel N. Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MAGNETICALLY LEVITATED AND DRIVEN RETICLE-MASKING BLADE STAGE MECHA...
- Publication number 20040239911
- Publication date Dec 2, 2004
- ASML Holding N.V.
- Frederick M. Carter
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method, system, and apparatus for management of reaction loads in a...
- Publication number 20040207830
- Publication date Oct 21, 2004
- ASML Holding, N. V.
- Daniel N. Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Actuator coil cooling system
- Publication number 20040207273
- Publication date Oct 21, 2004
- ASML Holding, N. V.
- Daniel N. Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Removable reticle window and support frame using magnetic force
- Publication number 20040135987
- Publication date Jul 15, 2004
- ASML Holding, N. V.
- Daniel N. Galburt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
High-resolution gas gauge proximity sensor
- Publication number 20040118183
- Publication date Jun 24, 2004
- Boguslaw F. Gajdeczko
- G05 - CONTROLLING REGULATING

Daniel Galburt

Person

Patents Grantslast 30 patents

Patterning device support, lithographic apparatus, and method of co...

Patterning device support, lithographic apparatus, and method of co...

Reticle cooling system in a lithographic apparatus

Patterning device support, lithographic apparatus, and method of co...

Fluid gauge proximity sensor and method of operating same using a m...

Method and system for operating an air gauge at programmable or con...

Method and system for operating an air gauge at programmable or con...

Method and system for improved trajectory planning and execution

Levitated reticle-masking blade stage

Lithographic apparatus and device manufacturing method utilizing a...

Drive for reticle-masking blade stage

System and method for patterning a flexible substrate in a lithogra...

Patterned mask holding device and method using two holding systems

Actuator coil cooling system

Lithographic tool with dual isolation system and method for configu...

Lithographic tool with dual isolation system and method for configu...

Fluid gauge proximity sensor and method of operating same using a m...

High-resolution gas gauge proximity sensor

Method and apparatus for cooling a reticle during lithographic expo...

Flexure-supported split reaction mass

System to increase throughput in a dual substrate stage double expo...

Method to increase throughput in a dual substrate stage double expo...

Removable reticle window and support frame using magnetic force

Gas gauge proximity sensor with a modulated gas flow

High-resolution gas gauge proximity sensor

Method, system, and apparatus for management of reaction loads in a...

System to increase throughput in a dual substrate stage double expo...

System, method, and apparatus for a magnetically levitated and driv...

Actuator coil cooling system

Removable reticle window and support frame using magnetic force

Patents Applicationslast 30 patents

Patterning Device Support, Lithographic Apparatus, And Method Of Co...

Patterning Device Support, Lithographic Apparatus, And Method Of Co...

Patterning Device Support, Lithographic Apparatus, And Method Of Co...

Reticle Cooling System In A Lithographic Apparatus

Method and System for Operating an Air Gauge at Programmable or Con...

Lithographic apparatus and device manufacturing method utilizing a...

Method and system for operating an air gauge at programmable or con...

Lithographic tool with dual isolation system and method for configu...

Patterned mask holding device and method using two holding systems

Levitated reticle-masking blade stage

Fluid gauge proximity sensor and method of operating same using a m...

Gas gauge proximity sensor with a modulated gas flow

High-resolution gas gauge proximity sensor

System to increase throughput in a dual substrate stage double expo...

Actuator coil cooling system

Removable reticle window and support frame using magnetic force

System and method for patterning a flexible substrate in a lithogra...

Levitated and driven reticle-masking blade stage

Method, system, and apparatus for management of reaction loads in a...

System to increase throughput in a dual substrate stage double expo...

Flexure-supported split reaction mass

Method and system for improved trajectory planning and execution

System to increase throughput in a dual substrate stage double expo...

System and method to increase throughput in a dual substrate stage...

System, method, and apparatus for a magnetically levitated and driv...

MAGNETICALLY LEVITATED AND DRIVEN RETICLE-MASKING BLADE STAGE MECHA...

Method, system, and apparatus for management of reaction loads in a...

Actuator coil cooling system

Removable reticle window and support frame using magnetic force

High-resolution gas gauge proximity sensor