Daniel Golde

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Oberkochen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Projection lens, projection exposure apparatus and projection expos...
- Patent number 10,591,825
- Issue date Mar 17, 2020
- Carl Zeiss SMT GmbH
- Stephan Andre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection lens, projection exposure apparatus and projection expos...
- Patent number 10,048,592
- Issue date Aug 14, 2018
- Carl Zeiss SMT GmbH
- Stephan Andre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure method and projection exposure apparatus
- Patent number 9,933,710
- Issue date Apr 3, 2018
- Carl Zeiss SMT GmbH
- Stephan Andre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MIRROR, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE A...
- Publication number 20230122333
- Publication date Apr 20, 2023
- Carl Zeiss SMT GMBH
- Kerstin HILD
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STOP, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS
- Publication number 20220107567
- Publication date Apr 7, 2022
- Carl Zeiss SMT GMBH
- Benjahman Julius Modeste
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection Lens, Projection Exposure Apparatus and Projection Expos...
- Publication number 20180364583
- Publication date Dec 20, 2018
- Carl Zeiss SMT GMBH
- Stephan Andre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE METHOD AND PROJECTION EXPOSURE APPARATUS
- Publication number 20170285493
- Publication date Oct 5, 2017
- Carl Zeiss SMT GMBH
- Stephan Andre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION LENS, PROJECTION EXPOSURE APPARATUS AND PROJECTION EXPOS...
- Publication number 20170168399
- Publication date Jun 15, 2017
- Carl Zeiss SMT GMBH
- Stephan Andre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY