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Daniel Heenan
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North East, MD, US
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last 30 patents
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Patent Grant
Planarization system and method using a carbonate containing fluid
Patent number
7,214,623
Issue date
May 8, 2007
International Business Machines Corporation
Donald J. Delehanty
B24 - GRINDING POLISHING
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Patent Grant
Carbonation of pH controlled KOH solution for improved polishing of...
Patent number
7,040,966
Issue date
May 9, 2006
Applied Materials
Joseph F. Salfelder
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
PLANARIZATION SYSTEM AND METHOD USING A CARBONATE CONTAINING FLUID
Publication number
20050079709
Publication date
Apr 14, 2005
International Business Machines Corporation
Donald J. Delehanty
B24 - GRINDING POLISHING
Information
Patent Application
Carbonation of pH controlled KOH solution for improved polishing of...
Publication number
20050042877
Publication date
Feb 24, 2005
Joseph F. Salfelder
H01 - BASIC ELECTRIC ELEMENTS