Daniel J. Devine

Person

Los Gatos, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Selective reflectivity process chamber with customized wavelength r...
- Patent number 9,633,876
- Issue date Apr 25, 2017
- Mattson Technology, Inc.
- Paul J. Timans
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Advanced multi-workpiece processing chamber
- Patent number 9,184,072
- Issue date Nov 10, 2015
- Mattson Technology, Inc.
- Daniel J. Devine
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Low cost high throughput processing platform
- Patent number 8,668,422
- Issue date Mar 11, 2014
- Mattson Technology, Inc.
- Leszek Niewmierzycki
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Slotted electrostatic shield modification for improved etch and CVD...
- Patent number 8,413,604
- Issue date Apr 9, 2013
- Mattson Technology, Inc.
- Rene George
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electrostatic chuck system and process for radially tuning the temp...
- Patent number 8,405,005
- Issue date Mar 26, 2013
- Mattson Technology, Inc.
- Martin L. Zucker
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Multi-workpiece processing chamber
- Patent number 8,066,815
- Issue date Nov 29, 2011
- Mattson Technology, Inc.
- Daniel J. Devine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for thermally processing a plurality of wafer-sha...
- Patent number 7,977,258
- Issue date Jul 12, 2011
- Mattson Technology, Inc.
- Zsolt Nenyei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece support with fluid zones for temperature control
- Patent number 7,972,444
- Issue date Jul 5, 2011
- Mattson Technology, Inc.
- Martin L. Zucker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective reflectivity process chamber with customized wavelength r...
- Patent number 7,737,385
- Issue date Jun 15, 2010
- Mattson Technology, Inc.
- Paul J. Timans
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Low cost high throughput processing platform
- Patent number 7,563,068
- Issue date Jul 21, 2009
- Mattson Technology, Inc.
- Leszek Niewmierzycki
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Multi-workpiece processing chamber
- Patent number 7,276,122
- Issue date Oct 2, 2007
- Mattson Technology, Inc.
- Daniel J. Devine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Slotted electrostatic shield modification for improved etch and CVD...
- Patent number 7,232,767
- Issue date Jun 19, 2007
- Mattson Technology, Inc.
- Rene George
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Selective reflectivity process chamber with customized wavelength r...
- Patent number 7,115,837
- Issue date Oct 3, 2006
- Mattson Technology, Inc.
- Paul J. Timans
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Shadow-free shutter arrangement and method
- Patent number 7,045,746
- Issue date May 16, 2006
- Mattson Technology, Inc.
- Daniel J. Devine
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Methods and apparatus for lithography of sparse arrays of sub-micro...
- Patent number 5,759,744
- Issue date Jun 2, 1998
- University of New Mexico
- Steven R.J. Brueck
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SLOTTED ELECTROSTATIC SHIELD MODIFICATION FOR IMPROVED ETCH AND CVD...
- Publication number 20130196510
- Publication date Aug 1, 2013
- Mattson Technology, Inc.
- Rene George
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Selective Reflectivity Process Chamber with Customized Wavelength R...
- Publication number 20100219174
- Publication date Sep 2, 2010
- Paul J. Timans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK SYSTEM AND PROCESS FOR RADIALLY TUNING THE TEMP...
- Publication number 20100193501
- Publication date Aug 5, 2010
- Mattson Technology, Inc.
- Martin L. Zucker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process and System For Varying the Exposure to a Chemical Ambient i...
- Publication number 20090325386
- Publication date Dec 31, 2009
- Mattson Technology, Inc.
- Daniel J. Devine
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for Plasma Process Performance Matching in Mul...
- Publication number 20090206056
- Publication date Aug 20, 2009
- Songlin Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Workpiece Support With Fluid Zones For Temperature Control
- Publication number 20090114158
- Publication date May 7, 2009
- Mattson Technology, Inc.
- Martin L. Zucker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADVANCED MULTI-WORKPIECE PROCESSING CHAMBER
- Publication number 20090028761
- Publication date Jan 29, 2009
- Daniel J. Devine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and system for thermally processing a plurality of wafer-sha...
- Publication number 20080248657
- Publication date Oct 9, 2008
- Zsolt Nenyei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-Workpiece Processing Chamber
- Publication number 20070281085
- Publication date Dec 6, 2007
- Daniel J. Devine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Low Cost High Throughput Processing Platform
- Publication number 20070175864
- Publication date Aug 2, 2007
- Leszek Niewmierzycki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Selective reflectivity process chamber with customized wavelength r...
- Publication number 20070131671
- Publication date Jun 14, 2007
- Paul J. Timans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Slotted Electrostatic Shield Modification for Improved Etch and CVD...
- Publication number 20070113979
- Publication date May 24, 2007
- Rene George
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Seal arrangement with corrosion barrier and method
- Publication number 20070012251
- Publication date Jan 18, 2007
- Martin Zucker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Low cost high throughput processing platform
- Publication number 20060045664
- Publication date Mar 2, 2006
- Leszek Niewmierzycki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process and system for heating semiconductor substrates in a proces...
- Publication number 20060032848
- Publication date Feb 16, 2006
- Young Jai Lee
- C30 - CRYSTAL GROWTH
Information Patent Application
Wedge-shaped window for providing a pressure differential
- Publication number 20050268567
- Publication date Dec 8, 2005
- Mattson Technology, Inc.
- Daniel J. Devine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-workpiece processing chamber
- Publication number 20050247265
- Publication date Nov 10, 2005
- Daniel J. Devine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Advanced multi-pressure workpiece processing
- Publication number 20050205210
- Publication date Sep 22, 2005
- Daniel J. Devine
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Shadow-free shutter arrangement and method
- Publication number 20050098553
- Publication date May 12, 2005
- Daniel J. Devine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Selective reflectivity process chamber with customized wavelength r...
- Publication number 20050023267
- Publication date Feb 3, 2005
- Paul J. Timans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Slotted electrostatic shield modification for improved etch and CVD...
- Publication number 20040244691
- Publication date Dec 9, 2004
- Rene George
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Apparatus and method for low temperature stripping of photoresist a...
- Publication number 20040154743
- Publication date Aug 12, 2004
- Stephen E. Savas
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Photoresist implant crust removal
- Publication number 20040084150
- Publication date May 6, 2004
- Rene George
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process and system for heating semiconductor substrates in a proces...
- Publication number 20030209326
- Publication date Nov 13, 2003
- Mattson Technology, Inc.
- Young Jai Lee
- C30 - CRYSTAL GROWTH

Daniel J. Devine

Person

Patents Grantslast 30 patents

Selective reflectivity process chamber with customized wavelength r...

Advanced multi-workpiece processing chamber

Low cost high throughput processing platform

Slotted electrostatic shield modification for improved etch and CVD...

Electrostatic chuck system and process for radially tuning the temp...

Multi-workpiece processing chamber

Method and system for thermally processing a plurality of wafer-sha...

Workpiece support with fluid zones for temperature control

Selective reflectivity process chamber with customized wavelength r...

Low cost high throughput processing platform

Multi-workpiece processing chamber

Slotted electrostatic shield modification for improved etch and CVD...

Selective reflectivity process chamber with customized wavelength r...

Shadow-free shutter arrangement and method

Methods and apparatus for lithography of sparse arrays of sub-micro...

Patents Applicationslast 30 patents

SLOTTED ELECTROSTATIC SHIELD MODIFICATION FOR IMPROVED ETCH AND CVD...

Selective Reflectivity Process Chamber with Customized Wavelength R...

ELECTROSTATIC CHUCK SYSTEM AND PROCESS FOR RADIALLY TUNING THE TEMP...

Process and System For Varying the Exposure to a Chemical Ambient i...

Method and Apparatus for Plasma Process Performance Matching in Mul...

Workpiece Support With Fluid Zones For Temperature Control

ADVANCED MULTI-WORKPIECE PROCESSING CHAMBER

Method and system for thermally processing a plurality of wafer-sha...

Multi-Workpiece Processing Chamber

Low Cost High Throughput Processing Platform

Selective reflectivity process chamber with customized wavelength r...

Slotted Electrostatic Shield Modification for Improved Etch and CVD...

Seal arrangement with corrosion barrier and method

Low cost high throughput processing platform

Process and system for heating semiconductor substrates in a proces...

Wedge-shaped window for providing a pressure differential

Multi-workpiece processing chamber

Advanced multi-pressure workpiece processing

Shadow-free shutter arrangement and method

Selective reflectivity process chamber with customized wavelength r...

Slotted electrostatic shield modification for improved etch and CVD...

Apparatus and method for low temperature stripping of photoresist a...

Photoresist implant crust removal

Process and system for heating semiconductor substrates in a proces...