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Daniel J. Golich
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San Diego, CA, US
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last 30 patents
Information
Patent Grant
Target for extreme ultraviolet light source
Patent number
9,462,668
Issue date
Oct 4, 2016
ASML Netherlands B.V.
Yezheng Tao
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Adaptive laser system for an extreme ultraviolet light source
Patent number
9,380,691
Issue date
Jun 28, 2016
ASML Netherlands B.V.
Yezheng Tao
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Target for extreme ultraviolet light source
Patent number
9,155,179
Issue date
Oct 6, 2015
ASML Netherlands B.V.
Yezheng Tao
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Target for extreme ultraviolet light source
Patent number
8,912,514
Issue date
Dec 16, 2014
ASML Netherlands B.V.
Yezheng Tao
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Target for extreme ultraviolet light source
Patent number
8,791,440
Issue date
Jul 29, 2014
ASML Netherlands B.V.
Yezheng Tao
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
System and Method for Isolating Gain Elements in a Laser System
Publication number
20160165709
Publication date
Jun 9, 2016
ASML NETHERLANDS B.V.
Yezheng Tao
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
TARGET FOR EXTREME ULTRAVIOLET LIGHT SOURCE
Publication number
20160029471
Publication date
Jan 28, 2016
ASML NETHERLANDS B.V.
Yezheng Tao
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ADAPTIVE LASER SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE
Publication number
20150250045
Publication date
Sep 3, 2015
ASML NETHERLANDS B.V.
Yezheng Tao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TARGET FOR EXTREME ULTRAVIOLET LIGHT SOURCE
Publication number
20150076374
Publication date
Mar 19, 2015
ASML NETHERLANDS B.V.
Yezheng Tao
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
TARGET FOR EXTREME ULTRAVIOLET LIGHT SOURCE
Publication number
20140299791
Publication date
Oct 9, 2014
Yezheng Tao
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING