Daniel Jozef Maria DIRECKS

Person

Simpelveld, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Fluid handling structure, lithographic apparatus and device manufac...
- Patent number 8,351,018
- Issue date Jan 8, 2013
- ASML Netherlands B.V.
- Daniel Jozef Maria Direcks
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Immersion lithographic apparatus, drying device, immersion metrolog...
- Patent number 8,345,218
- Issue date Jan 1, 2013
- ASML Netherlands B.V.
- Michel Riepen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion lithographic apparatus and device manufacturing method
- Patent number 8,259,283
- Issue date Sep 4, 2012
- ASML Netherlands B.V.
- Daniël Jozef Maria Direcks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,218,126
- Issue date Jul 10, 2012
- ASML Netherlands B.V.
- Koen Steffens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus having parts with a coated film adhered thereto
- Patent number 7,561,250
- Issue date Jul 14, 2009
- ASML Netherlands B.V.
- Paulus Martinus Maria Liebregts
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND A DEVICE MANUF...
- Publication number 20110255062
- Publication date Oct 20, 2011
- ASML NETHERLANDS B.V.
- Danny Maria Hubertus PHILIPS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
- Publication number 20110188012
- Publication date Aug 4, 2011
- ASML NETHERLANDS B.V.
- Daniel Jozef Maria DIRECKS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFAC...
- Publication number 20110013158
- Publication date Jan 20, 2011
- ASML NETHERLANDS B.V.
- Danny Maria Hubertus PHILIPS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFAC...
- Publication number 20110005603
- Publication date Jan 13, 2011
- ASML NETHERLANDS B.V.
- Hrishikesh Patel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC APPARATUS, A METHOD OF CONTROLLING THE APPARATUS AND A...
- Publication number 20110007286
- Publication date Jan 13, 2011
- ASML NETHERLANDS B.V.
- Daniel Jozef Maria DIRECKS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFAC...
- Publication number 20100085545
- Publication date Apr 8, 2010
- ASML NETHERLANDS B.V.
- Daniel Jozef Maria DIRECKS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFAC...
- Publication number 20090279062
- Publication date Nov 12, 2009
- ASML NETHERLANDS B.V.
- Daniel Jozef Maria DIRECKS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMMERSION LITHOGRAPHIC APPARATUS, DRYING DEVICE, IMMERSION METROLOG...
- Publication number 20090279063
- Publication date Nov 12, 2009
- ASML NETHERLANDS B.V.
- Michel Riepen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFAC...
- Publication number 20090279060
- Publication date Nov 12, 2009
- ASML NETHERLANDS B.V.
- Daniel Jozef Maria DIRECKS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20090237632
- Publication date Sep 24, 2009
- ASML NETHERLANDS B.V.
- Daniel Jozef Maria Direcks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20090147227
- Publication date Jun 11, 2009
- ASML NETHERLANDS B.V.
- Koen Steffens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20090073395
- Publication date Mar 19, 2009
- ASML NETHERLANDS B.V.
- Paul Petrus Joannes Berkvens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus having parts with a coated film adhered thereto
- Publication number 20080316441
- Publication date Dec 25, 2008
- ASML Netherland B.V.
- Paulus Martinus Maria Liebregts
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Daniel Jozef Maria DIRECKS

Person

Patents Grantslast 30 patents

Fluid handling structure, lithographic apparatus and device manufac...

Immersion lithographic apparatus, drying device, immersion metrolog...

Immersion lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus having parts with a coated film adhered thereto

Patents Applicationslast 30 patents

FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND A DEVICE MANUF...

LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD

FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFAC...

FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFAC...

LITHOGRAPHIC APPARATUS, A METHOD OF CONTROLLING THE APPARATUS AND A...

FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFAC...

FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFAC...

IMMERSION LITHOGRAPHIC APPARATUS, DRYING DEVICE, IMMERSION METROLOG...

FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFAC...

IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus having parts with a coated film adhered thereto