Daniel Kavaldjiev

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for rotating an optical objective
- Patent number 11,733,172
- Issue date Aug 22, 2023
- KLA Corporation
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Grant
Multi-spot analysis system with multiple optical probes
- Patent number 11,441,893
- Issue date Sep 13, 2022
- KLA Corporation
- Prasanna Dighe
- G02 - OPTICS
Information Patent Grant
Sensitive particle detection with spatially-varying polarization ro...
- Patent number 11,243,175
- Issue date Feb 8, 2022
- KLA Corporation
- Xuefeng Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sensitive particle detection with spatially-varying polarization ro...
- Patent number 10,948,423
- Issue date Mar 16, 2021
- KLA Corporation
- Xuefeng Liu
- G01 - MEASURING TESTING
Information Patent Grant
Radial polarizer for particle detection
- Patent number 10,942,135
- Issue date Mar 9, 2021
- KLA Corporation
- Jenn-Kuen Leong
- G01 - MEASURING TESTING
Information Patent Grant
Minimizing filed size to reduce unwanted stray light
- Patent number 10,739,276
- Issue date Aug 11, 2020
- KLA-Tencor Corporation
- Donald Pettibone
- G01 - MEASURING TESTING
Information Patent Grant
Wafer inspection
- Patent number 10,488,348
- Issue date Nov 26, 2019
- KLA-Tencor Corp.
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Grant
Dark-field inspection using a low-noise sensor
- Patent number 10,462,391
- Issue date Oct 29, 2019
- KLA-Tencor Corporation
- Yung-Ho Alex Chuang
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Wafer inspection
- Patent number 9,915,622
- Issue date Mar 13, 2018
- KLA-Tencor Corp.
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Grant
TDI sensor in a darkfield system
- Patent number 9,891,177
- Issue date Feb 13, 2018
- KLA-Tencor Corporation
- Jijen Vazhaeparambil
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Wafer inspection
- Patent number 9,279,774
- Issue date Mar 8, 2016
- KLA-Tencor Corp.
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Grant
Grazing and normal incidence interferometer having common reference...
- Patent number 9,273,952
- Issue date Mar 1, 2016
- KLA-Tencor Corporation
- Dieter Mueller
- G01 - MEASURING TESTING
Information Patent Grant
Sample inspection system detector
- Patent number 9,086,389
- Issue date Jul 21, 2015
- KLA-Tencor Corporation
- Daniel Ivanov Kavaldjiev
- G01 - MEASURING TESTING
Information Patent Grant
Monitoring incident beam position in a wafer inspection system
- Patent number 8,934,091
- Issue date Jan 13, 2015
- KLA-Tencor Corp.
- Juergen Reich
- G01 - MEASURING TESTING
Information Patent Grant
Grazing and normal incidence interferometer having common reference...
- Patent number 8,786,842
- Issue date Jul 22, 2014
- KLA-Tencor Corporation
- Dieter Muller
- G01 - MEASURING TESTING
Information Patent Grant
Photomultiplier tube optimized for surface inspection in the ultrav...
- Patent number 8,629,384
- Issue date Jan 14, 2014
- KLA-Tencor Corporation
- Stephen Biellak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Segmented polarizer for optimizing performance of a surface inspect...
- Patent number 8,520,208
- Issue date Aug 27, 2013
- KLA-Tencor Corporation
- Stephen Biellak
- G01 - MEASURING TESTING
Information Patent Grant
Computer-implemented methods, computer-readable media, and systems...
- Patent number 8,494,802
- Issue date Jul 23, 2013
- KLA-Tencor Corp.
- Haiguang Chen
- G01 - MEASURING TESTING
Information Patent Grant
Fast laser power control with improved reliability for surface insp...
- Patent number 8,294,887
- Issue date Oct 23, 2012
- KLA-Tencor Corporation
- Stephen Biellak
- G01 - MEASURING TESTING
Information Patent Grant
Computer-implemented methods for inspecting and/or classifying a wafer
- Patent number 8,269,960
- Issue date Sep 18, 2012
- KLA-Tencor Corp.
- Juergen Reich
- G01 - MEASURING TESTING
Information Patent Grant
Segmented polarizer for optimizing performance of a surface inspect...
- Patent number 8,169,613
- Issue date May 1, 2012
- KLA-Tencor Corp.
- Stephen Biellak
- G01 - MEASURING TESTING
Information Patent Grant
Dynamic range extension in surface inspection systems
- Patent number 8,134,698
- Issue date Mar 13, 2012
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for measuring shape or thickness information o...
- Patent number 8,068,234
- Issue date Nov 29, 2011
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for determining two or more characteristics of...
- Patent number 7,912,658
- Issue date Mar 22, 2011
- KLA-Tencor Corp.
- Stephen Biellak
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for scanning, stitching and damping measuremen...
- Patent number 7,663,746
- Issue date Feb 16, 2010
- KLA-Tencor Techologies Corporation
- Paul J. Sullivan
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for detecting pinholes in a film formed on a wa...
- Patent number 7,528,944
- Issue date May 5, 2009
- KLA-Tencor Technologies Corporation
- David Chen
- G01 - MEASURING TESTING
Information Patent Grant
Computer-implemented methods and systems for determining a configur...
- Patent number 7,436,505
- Issue date Oct 14, 2008
- KLA-Tencor Technologies Corp.
- Alexander Belyaev
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for scanning, stitching, and damping measureme...
- Patent number 7,436,506
- Issue date Oct 14, 2008
- KLA-Tencor Corporation
- Paul J. Sullivan
- G01 - MEASURING TESTING
Information Patent Grant
Reduced coherence symmetric grazing incidence differential interfer...
- Patent number 7,173,715
- Issue date Feb 6, 2007
- KLA-Tencor Corporation
- Dieter Mueller
- G01 - MEASURING TESTING
Information Patent Grant
Reduced coherence symmetric grazing incidence differential interfer...
- Patent number 7,057,741
- Issue date Jun 6, 2006
- KLA-Tencor Corporation
- Dieter Mueller
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR ROTATING AN OPTICAL OBJECTIVE
- Publication number 20210356406
- Publication date Nov 18, 2021
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Application
SENSITIVE PARTICLE DETECTION WITH SPATIALLY-VARYING POLARIZATION RO...
- Publication number 20210164918
- Publication date Jun 3, 2021
- KLA Corporation
- Xuefeng Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sensitive Particle Detection with Spatially-Varying Polarization Ro...
- Publication number 20200264109
- Publication date Aug 20, 2020
- KLA Corporation
- Xuefeng Liu
- G01 - MEASURING TESTING
Information Patent Application
Radial Polarizer for Particle Detection
- Publication number 20200150054
- Publication date May 14, 2020
- KLA Corporation
- Jenn-Kuen Leong
- G01 - MEASURING TESTING
Information Patent Application
Multi-Spot Analysis System with Multiple Optical Probes
- Publication number 20190331592
- Publication date Oct 31, 2019
- KLA-Tencor Corporation
- Prasanna Dighe
- G01 - MEASURING TESTING
Information Patent Application
Minimizing Field Size to Reduce Unwanted Stray Light
- Publication number 20190137411
- Publication date May 9, 2019
- KLA-Tencor Corporation
- Donald Pettibone
- G01 - MEASURING TESTING
Information Patent Application
Wafer Inspection
- Publication number 20180164228
- Publication date Jun 14, 2018
- KLA-Tencor Corporation
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Application
Dark-Field Inspection Using A Low-Noise Sensor
- Publication number 20170048467
- Publication date Feb 16, 2017
- KLA-Tencor Corporation
- Yung-Ho Alex Chuang
- G01 - MEASURING TESTING
Information Patent Application
TDI Sensor in a Darkfield System
- Publication number 20160097727
- Publication date Apr 7, 2016
- KLA-Tencor Corporation
- Jijen Vazhaeparambil
- G01 - MEASURING TESTING
Information Patent Application
Wafer Inspection
- Publication number 20150369753
- Publication date Dec 24, 2015
- KLA-Tencor Corporation
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Application
Grazing and Normal Incidence Interferometer Having Common Reference...
- Publication number 20140333937
- Publication date Nov 13, 2014
- Dieter Mueller
- G01 - MEASURING TESTING
Information Patent Application
Sample Inspection System Detector
- Publication number 20140118730
- Publication date May 1, 2014
- KLA-Tencor Corporation
- Daniel Ivanov Kavaldjiev
- G01 - MEASURING TESTING
Information Patent Application
Monitoring Incident Beam Position in a Wafer Inspection System
- Publication number 20140071437
- Publication date Mar 13, 2014
- KLA-Tencor Corporation
- Juergen Reich
- G01 - MEASURING TESTING
Information Patent Application
Wafer Inspection
- Publication number 20130016346
- Publication date Jan 17, 2013
- KLA-Tencor Corporation
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Application
COMPUTER-IMPLEMENTED METHODS, COMPUTER-READABLE MEDIA, AND SYSTEMS...
- Publication number 20110196639
- Publication date Aug 11, 2011
- Kla-Tencor Corporation
- Haiguang Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR MEASURING SHAPE OR THICKNESS INFORMATION O...
- Publication number 20100208272
- Publication date Aug 19, 2010
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Application
COMPUTER-IMPLEMENTED METHODS FOR INSPECTING AND/OR CLASSIFYING A WAFER
- Publication number 20100060888
- Publication date Mar 11, 2010
- KLA-Tencor Corporation
- Juergen Reich
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR DETERMINING TWO OR MORE CHARACTERISTICS OF...
- Publication number 20090299655
- Publication date Dec 3, 2009
- Stephen Biellak
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for scanning, stitching and damping measuremen...
- Publication number 20090040514
- Publication date Feb 12, 2009
- KLA-Tencor Technologies Corporation
- Paul J. Sullivan
- G01 - MEASURING TESTING
Information Patent Application
Reduced coherence symmetric grazing incidence differential interfer...
- Publication number 20080278732
- Publication date Nov 13, 2008
- KLA-Tencor Corporation
- Dieter Mueller
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR DETECTING PINHOLES IN A FILM FORMED ON A WA...
- Publication number 20080018887
- Publication date Jan 24, 2008
- David Chen
- G01 - MEASURING TESTING
Information Patent Application
Computer-Implemented Methods and Systems for Determining a Configur...
- Publication number 20070229809
- Publication date Oct 4, 2007
- KLA-TENCOR TECHNOLOGIES CORP.
- Alexander Belyaev
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for scanning, stitching, and damping measureme...
- Publication number 20060232770
- Publication date Oct 19, 2006
- Paul J. Sullivan
- G01 - MEASURING TESTING
Information Patent Application
Reduced coherence symmetric grazing incidence differential interfer...
- Publication number 20060126076
- Publication date Jun 15, 2006
- KLA-Tencor Corporation
- Dieter Mueller
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for scanning, stitching, and damping measureme...
- Publication number 20040145733
- Publication date Jul 29, 2004
- KLA-Tencor Corporation
- Paul J. Sullivan
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for scanning, stitching, and damping measureme...
- Publication number 20020154296
- Publication date Oct 24, 2002
- KLA-Tencor Corporation
- Paul J. Sullivan
- G01 - MEASURING TESTING

Daniel Kavaldjiev

Person

Patents Grantslast 30 patents

Apparatus and method for rotating an optical objective

Multi-spot analysis system with multiple optical probes

Sensitive particle detection with spatially-varying polarization ro...

Sensitive particle detection with spatially-varying polarization ro...

Radial polarizer for particle detection

Minimizing filed size to reduce unwanted stray light

Wafer inspection

Dark-field inspection using a low-noise sensor

Wafer inspection

TDI sensor in a darkfield system

Wafer inspection

Grazing and normal incidence interferometer having common reference...

Sample inspection system detector

Monitoring incident beam position in a wafer inspection system

Grazing and normal incidence interferometer having common reference...

Photomultiplier tube optimized for surface inspection in the ultrav...

Segmented polarizer for optimizing performance of a surface inspect...

Computer-implemented methods, computer-readable media, and systems...

Fast laser power control with improved reliability for surface insp...

Computer-implemented methods for inspecting and/or classifying a wafer

Segmented polarizer for optimizing performance of a surface inspect...

Dynamic range extension in surface inspection systems

Method and apparatus for measuring shape or thickness information o...

Systems and methods for determining two or more characteristics of...

Method and apparatus for scanning, stitching and damping measuremen...

Methods and systems for detecting pinholes in a film formed on a wa...

Computer-implemented methods and systems for determining a configur...

Method and apparatus for scanning, stitching, and damping measureme...

Reduced coherence symmetric grazing incidence differential interfer...

Reduced coherence symmetric grazing incidence differential interfer...

Patents Applicationslast 30 patents

APPARATUS AND METHOD FOR ROTATING AN OPTICAL OBJECTIVE

SENSITIVE PARTICLE DETECTION WITH SPATIALLY-VARYING POLARIZATION RO...

Sensitive Particle Detection with Spatially-Varying Polarization Ro...

Radial Polarizer for Particle Detection

Multi-Spot Analysis System with Multiple Optical Probes

Minimizing Field Size to Reduce Unwanted Stray Light

Wafer Inspection

Dark-Field Inspection Using A Low-Noise Sensor

TDI Sensor in a Darkfield System

Wafer Inspection

Grazing and Normal Incidence Interferometer Having Common Reference...

Sample Inspection System Detector

Monitoring Incident Beam Position in a Wafer Inspection System

Wafer Inspection

COMPUTER-IMPLEMENTED METHODS, COMPUTER-READABLE MEDIA, AND SYSTEMS...

METHOD AND APPARATUS FOR MEASURING SHAPE OR THICKNESS INFORMATION O...

COMPUTER-IMPLEMENTED METHODS FOR INSPECTING AND/OR CLASSIFYING A WAFER

SYSTEMS AND METHODS FOR DETERMINING TWO OR MORE CHARACTERISTICS OF...

Method and apparatus for scanning, stitching and damping measuremen...

Reduced coherence symmetric grazing incidence differential interfer...

METHODS AND SYSTEMS FOR DETECTING PINHOLES IN A FILM FORMED ON A WA...

Computer-Implemented Methods and Systems for Determining a Configur...

Method and apparatus for scanning, stitching, and damping measureme...

Reduced coherence symmetric grazing incidence differential interfer...

Method and apparatus for scanning, stitching, and damping measureme...

Method and apparatus for scanning, stitching, and damping measureme...