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Daniel L. Belin
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Cupertino, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Auto-focus system and methods for die-to-die inspection
Patent number
9,110,039
Issue date
Aug 18, 2015
KLA-Tencor Corporation
Michael J. Wright
G01 - MEASURING TESTING
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Patent Grant
Auto focus system for reticle inspection
Patent number
8,928,895
Issue date
Jan 6, 2015
KLA-Tencor Corporation
Michael J. Wright
G01 - MEASURING TESTING
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Patent Grant
Auto focus system for reticle inspection
Patent number
7,835,015
Issue date
Nov 16, 2010
KLA-Tencor Corporation
Michael J. Wright
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
AUTO-FOCUS SYSTEM AND METHODS FOR DIE-TO-DIE INSPECTION
Publication number
20150029499
Publication date
Jan 29, 2015
KLA-Tencor Corporation
Michael J. Wright
G01 - MEASURING TESTING
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Patent Application
Auto Focus System for Reticle Inspection
Publication number
20110019206
Publication date
Jan 27, 2011
KLA-Tencor Corporation
Michael J. Wright
G01 - MEASURING TESTING