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Daniel L. Cavan
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Woodside, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Inspection system including parallel imaging paths with multiple an...
Patent number
10,429,319
Issue date
Oct 1, 2019
KLA-Tencor Corporation
Shiow-Hwei Hwang
G01 - MEASURING TESTING
Information
Patent Grant
System and method for reducing dynamic range in images of patterned...
Patent number
9,703,207
Issue date
Jul 11, 2017
KLA-Tencor Corporation
Daniel L. Cavan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Super resolution inspection system
Patent number
9,128,064
Issue date
Sep 8, 2015
KLA-Tencor Corporation
Daniel L. Cavan
G01 - MEASURING TESTING
Information
Patent Grant
Active planar autofocus
Patent number
8,643,835
Issue date
Feb 4, 2014
KLA-Tencor Corporation
Scott A. Young
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for identifying defects in a substrate surface...
Patent number
7,227,984
Issue date
Jun 5, 2007
KLA-Tencor Technologies Corporation
Daniel L. Cavan
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Inspection system for array of microcircuit dies having redundant c...
Patent number
RE33956
Issue date
Jun 9, 1992
Insystems, Inc.
Lawrence H. Lin
250 - Radiant energy
Information
Patent Grant
Method and apparatus for detecting defect information in a holograp...
Patent number
4,811,409
Issue date
Mar 7, 1989
Insystems, Inc.
Daniel L. Cavan
G01 - MEASURING TESTING
Information
Patent Grant
Inspection system for array of microcircuit dies having redundant c...
Patent number
4,806,774
Issue date
Feb 21, 1989
Insystems, Inc.
Lawrence H. Lin
G01 - MEASURING TESTING
Information
Patent Grant
Rotatable and translatable mounting mechanism for a specimen patter...
Patent number
4,659,172
Issue date
Apr 21, 1987
Insystems, Inc.
Daniel L. Cavan
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
Inspection System Including Parallel Imaging Paths with Multiple an...
Publication number
20140285657
Publication date
Sep 25, 2014
KLA-Tencor Corporation
Shiow-Hwei Hwang
G01 - MEASURING TESTING
Information
Patent Application
SUPER RESOLUTION INSPECTION SYSTEM
Publication number
20130321797
Publication date
Dec 5, 2013
KLA-Tencor Corporation
Daniel L. Cavan
G01 - MEASURING TESTING
Information
Patent Application
Active Planar Autofocus
Publication number
20120008137
Publication date
Jan 12, 2012
KLA-Tencor Corporation
Scott A. Young
G01 - MEASURING TESTING
Information
Patent Application
Method and apparatus for identifying defects in a substrate surface...
Publication number
20040175028
Publication date
Sep 9, 2004
KLA-Tencor Technologies Corporation
Daniel L. Cavan
G06 - COMPUTING CALCULATING COUNTING