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Etching techniques
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Patent number 4,498,953
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Issue date Feb 12, 1985
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AT&T Bell Laboratories
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Joel M. Cook
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Spectroscopic monitoring of gas-solid processes
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Patent number 4,394,237
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Issue date Jul 19, 1983
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Bell Telephone Laboratories, Incorporated
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Vincent M. Donnelly
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Plasma etching of silicon
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Patent number 4,310,380
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Issue date Jan 12, 1982
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Bell Telephone Laboratories, Incorporated
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Daniel L. Flamm
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H01 - BASIC ELECTRIC ELEMENTS