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Daniel Lenz
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Aalen, DE
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Patents Grants
last 30 patents
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Patent Grant
Method for adjusting a lighting setting
Patent number
10,514,606
Issue date
Dec 24, 2019
Carl Zeiss SMT GmbH
Alexander Winkler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination optics for EUV projection lithography
Patent number
9,939,731
Issue date
Apr 10, 2018
Carl Zeiss SMT GmbH
Alexander Winkler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
METHOD FOR INCORPORATING TEMPERATURE-REGULATING HOLLOW STRUCTURES I...
Publication number
20240419066
Publication date
Dec 19, 2024
Carl Zeiss SMT GMBH
Uwe BIELKE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR ADJUSTING A LIGHTING SETTING
Publication number
20190146353
Publication date
May 16, 2019
Carl Zeiss SMT GMBH
Alexander Winkler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ILLUMINATION OPTICS FOR EUV PROJECTION LITHOGRAPHY
Publication number
20170336719
Publication date
Nov 23, 2017
Alexander Winkler
G02 - OPTICS