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Daniel Leslie HALL
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San Diego, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Lithographic apparatus and electrostatic clamp designs
Patent number
12,174,552
Issue date
Dec 24, 2024
ASML Holding N.V.
Victor Antonio Perez-Falcon
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Apparatus for and method of in-situ particle removal in a lithograp...
Patent number
11,550,231
Issue date
Jan 10, 2023
ASML Holding N.V.
Jeffrey John Lombardo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
LITHOGRAPHIC APPARATUS AND ELECTROSTATIC CLAMP DESIGNS
Publication number
20230008474
Publication date
Jan 12, 2023
ASML Holding N.V.
Victor Antonio PEREZ-FALCON
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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Patent Application
APPARATUS FOR AND METHOD OF IN-SITU PARTICLE REMOVAL IN A LITHOGRAP...
Publication number
20220075277
Publication date
Mar 10, 2022
ASML Holding N.V.
Jeffrey John LOMBARDO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY