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DANIEL MOONEN
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DELFT, NL
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last 30 patents
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Patent Grant
Lens array for electron beam lithography tool
Patent number
7,345,290
Issue date
Mar 18, 2008
Agere Systems Inc.
Victor Katsap
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Illumination system for electron beam lithography tool
Patent number
6,333,508
Issue date
Dec 25, 2001
Lucent Technologies, Inc.
Victor Katsap
B82 - NANO-TECHNOLOGY
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last 30 patents
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Patent Application
LENS ARRAY FOR ELECTRON BEAM LITHOGRAPHY TOOL
Publication number
20030010934
Publication date
Jan 16, 2003
VICTOR KATSAP
H01 - BASIC ELECTRIC ELEMENTS