Daniel Nathan BURBANK

Person

Wilton, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Particle suppression systems and methods
- Patent number 11,204,558
- Issue date Dec 21, 2021
- ASML Netherlands B.V.
- Yang-Shan Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle clamping device
- Patent number 10,761,435
- Issue date Sep 1, 2020
- ASML Holding N.V.
- Enrico Zordan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Membrane assembly and particle trap
- Patent number 10,585,359
- Issue date Mar 10, 2020
- ASML Holding N.V.
- Ronald Peter Albright
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle cooling by non-uniform gas flow
- Patent number 10,423,081
- Issue date Sep 24, 2019
- ASML Holding N.V.
- Thomas Venturino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gas flow optimization in reticle stage environment
- Patent number 10,031,428
- Issue date Jul 24, 2018
- ASML Netherlands B.V.
- Koen Cuypers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning device support, lithographic apparatus, and method of co...
- Patent number 9,977,351
- Issue date May 22, 2018
- ASML Holding N.V.
- Earl William Ebert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning device manipulating system and lithographic apparatuses
- Patent number 9,910,368
- Issue date Mar 6, 2018
- ASML Netherlands B.V.
- Christiaan Louis Valentin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning device support, lithographic apparatus, and method of co...
- Patent number 9,766,557
- Issue date Sep 19, 2017
- ASML Holding N.V.
- Earl William Ebert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning device support and lithographic apparatus
- Patent number 9,740,112
- Issue date Aug 22, 2017
- ASML Holding N.V.
- Arindam Sinharoy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle cooling system in a lithographic apparatus
- Patent number 9,632,434
- Issue date Apr 25, 2017
- ASML Holding N.V.
- Earl William Ebert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning device support, lithographic apparatus, and method of co...
- Patent number 9,632,433
- Issue date Apr 25, 2017
- ASML Holding N.V.
- Earl William Ebert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Determining position and curvature information directly from a surf...
- Patent number 9,377,700
- Issue date Jun 28, 2016
- ASML Holding N.V.
- Mark Josef Schuster
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC APPARATUS, LOCKING DEVICE, AND METHOD
- Publication number 20240319618
- Publication date Sep 26, 2024
- ASML Holding N.V.
- Daniel Nathan BURBANK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PARTICLE SUPPRESSION SYSTEMS AND METHODS
- Publication number 20200142326
- Publication date May 7, 2020
- ASML NETHERLANDS B.V.
- Yang-Shan HUANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A Membrane Assembly and Particle Trap
- Publication number 20190171119
- Publication date Jun 6, 2019
- ASML Holding N.V.
- Ronald Peter ALBRIGHT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Reticle Cooling by Non-Uniform Gas Flow
- Publication number 20170363973
- Publication date Dec 21, 2017
- ASML Holding N.V.
- Thomas VENTURINO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Patterning Device Support, Lithographic Apparatus, And Method Of Co...
- Publication number 20170307986
- Publication date Oct 26, 2017
- ASML Holding N.V.
- Earl William EBERT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Patterning Device Support, Lithographic Apparatus, And Method Of Co...
- Publication number 20170160652
- Publication date Jun 8, 2017
- ASML Holding N.V.
- Earl William EBERT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Gas Flow Optimization in Reticle Stage Environment
- Publication number 20150355557
- Publication date Dec 10, 2015
- ASML NETHERLANDS B.V.
- Koen CUYPERS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Patterning Device Support, Lithographic Apparatus, And Method Of Co...
- Publication number 20150301456
- Publication date Oct 22, 2015
- ASML Holding N.V.
- Earl William EBERT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Patterning Device Support and Lithographic Apparatus
- Publication number 20150277240
- Publication date Oct 1, 2015
- ASML Holding N.V.
- Arindam Sinharoy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Patterning Device Manipulating System and Lithographic Apparatuses
- Publication number 20150277241
- Publication date Oct 1, 2015
- ASML NETHERLANDS B.V.
- Christiaan Louis Valentin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Reticle Cooling System In A Lithographic Apparatus
- Publication number 20150241796
- Publication date Aug 27, 2015
- ASML Holding N.V.
- Earl William EBERT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Heating and Cooling Systems in a Lithographic Apparatus
- Publication number 20150192856
- Publication date Jul 9, 2015
- ASML NETHERLANDS B.V.
- Johannes Onvlee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETERMINING POSITION AND CURVATURE INFORMATION DIRECTLY FROM A SURF...
- Publication number 20140307246
- Publication date Oct 16, 2014
- ASML Holding N.V.
- Mark Josef Schuster
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Daniel Nathan BURBANK

Person

Patents Grantslast 30 patents

Particle suppression systems and methods

Reticle clamping device

Membrane assembly and particle trap

Reticle cooling by non-uniform gas flow

Gas flow optimization in reticle stage environment

Patterning device support, lithographic apparatus, and method of co...

Patterning device manipulating system and lithographic apparatuses

Patterning device support, lithographic apparatus, and method of co...

Patterning device support and lithographic apparatus

Reticle cooling system in a lithographic apparatus

Patterning device support, lithographic apparatus, and method of co...

Determining position and curvature information directly from a surf...

Patents Applicationslast 30 patents

LITHOGRAPHIC APPARATUS, LOCKING DEVICE, AND METHOD

PARTICLE SUPPRESSION SYSTEMS AND METHODS

A Membrane Assembly and Particle Trap

Reticle Cooling by Non-Uniform Gas Flow

Patterning Device Support, Lithographic Apparatus, And Method Of Co...

Patterning Device Support, Lithographic Apparatus, And Method Of Co...

Gas Flow Optimization in Reticle Stage Environment

Patterning Device Support, Lithographic Apparatus, And Method Of Co...

Patterning Device Support and Lithographic Apparatus

Patterning Device Manipulating System and Lithographic Apparatuses

Reticle Cooling System In A Lithographic Apparatus

Heating and Cooling Systems in a Lithographic Apparatus

DETERMINING POSITION AND CURVATURE INFORMATION DIRECTLY FROM A SURF...