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Daniel P. Cunnane
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Pasadena, CA, US
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last 30 patents
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Patent Grant
Methods and systems for atomic layer etching and atomic layer depos...
Patent number
11,864,472
Issue date
Jan 2, 2024
California Institute of Technology
Harold Frank Greer
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last 30 patents
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Patent Application
WAFER SCALE PRODUCTION OF SUPERCONDUCTING MAGNESIUM DIBORIDE THIN...
Publication number
20230120408
Publication date
Apr 20, 2023
California Institute of Technology
Changsub Kim
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHODS AND SYSTEMS FOR ATOMIC LAYER ETCHING AND ATOMIC LAYER DEPOS...
Publication number
20220013706
Publication date
Jan 13, 2022
California Institute of Technology
Harold Frank Greer
H01 - BASIC ELECTRIC ELEMENTS