Daniel P. Spence

Person

Carlsbad, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Precursors and flowable CVD methods for making low-k films to fill...
- Patent number 11,735,413
- Issue date Aug 22, 2023
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organoamino-polysiloxanes for deposition of silicon-containing films
- Patent number 11,591,692
- Issue date Feb 28, 2023
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bisaminoalkoxysilane compounds and methods for using same to deposi...
- Patent number 11,142,658
- Issue date Oct 12, 2021
- VERSUM MATERIALS US, LLC
- Daniel P. Spence
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Silacycloalkane compounds and methods for depositing silicon contai...
- Patent number 11,043,374
- Issue date Jun 22, 2021
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alkoxysilylamine compounds and applications thereof
- Patent number 10,899,500
- Issue date Jan 26, 2021
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Bisaminoalkoxysilane compounds and methods for using same to deposi...
- Patent number 10,421,766
- Issue date Sep 24, 2019
- VERSUM MATERIALS US, LLC
- Daniel P. Spence
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alkoxysilylamine compounds and applications thereof
- Patent number 10,279,959
- Issue date May 7, 2019
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing films with organoaminodisilane precursors
- Patent number 10,283,350
- Issue date May 7, 2019
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Compositions and methods using same for flowable oxide deposition
- Patent number 10,170,297
- Issue date Jan 1, 2019
- VERSUM MATERIALS US, LLC
- Ronald Martin Pearlstein
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Methods for depositing films with organoaminodisilane precursors
- Patent number 9,997,350
- Issue date Jun 12, 2018
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Organoaminodisilane precursors and methods for depositing films com...
- Patent number 9,978,585
- Issue date May 22, 2018
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Catalyst and formulations comprising same for alkoxysilanes hydroly...
- Patent number 9,809,711
- Issue date Nov 7, 2017
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
AZA-polysilane precursors and methods for depositing films comprisi...
- Patent number 9,796,739
- Issue date Oct 24, 2017
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alkoxyaminosilane compounds and applications thereof
- Patent number 9,677,178
- Issue date Jun 13, 2017
- VERSUM MATERIALS US, LLC
- Daniel P. Spence
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing films with organoaminodisilane precursors
- Patent number 9,613,799
- Issue date Apr 4, 2017
- Air Products and Chemicals, Inc.
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing films with organoaminodisilane precursors
- Patent number 9,337,018
- Issue date May 10, 2016
- Air Products and Chemicals, Inc.
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alkoxyaminosilane compounds and applications thereof
- Patent number 9,200,167
- Issue date Dec 1, 2015
- Air Products and Chemicals, Inc.
- Daniel P. Spence
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Multidentate ketoimine ligands for metal complexes
- Patent number 9,079,923
- Issue date Jul 14, 2015
- Air Products and Chemicals, Inc.
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Complexes of imidazole ligands
- Patent number 9,018,387
- Issue date Apr 28, 2015
- Air Products and Chemicals, Inc.
- John Anthony Thomas Norman
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Group 4 metal precursors for metal-containing films
- Patent number 8,952,188
- Issue date Feb 10, 2015
- Air Products and Chemicals, Inc.
- Sergei Vladimirovich Ivanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for preparing metal complexes of polydentate beta-ketoiminates
- Patent number 8,722,933
- Issue date May 13, 2014
- Air Products and Chemicals, Inc.
- Xinjian Lei
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Complexes of imidazole ligands
- Patent number 8,680,289
- Issue date Mar 25, 2014
- Air Products and Chemicals, Inc.
- John Anthony Thomas Norman
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Amidate precursors for depositing metal containing films
- Patent number 8,642,797
- Issue date Feb 4, 2014
- Air Products and Chemicals, Inc.
- Sergei Vladimirovich Ivanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal complexes for metal-containing film deposition
- Patent number 8,617,305
- Issue date Dec 31, 2013
- Air Products and Chemicals, Inc.
- Xinjian Lei
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Liquid precursor for depositing group 4 metal containing films
- Patent number 8,592,606
- Issue date Nov 26, 2013
- Air Products and Chemicals, Inc.
- Xinjian Lei
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Liquid composition containing aminoether for deposition of metal-co...
- Patent number 8,507,704
- Issue date Aug 13, 2013
- Air Products and Chemicals, Inc.
- Sergei Vladimirovich Ivanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursors for depositing group 4 metal-containing films
- Patent number 8,471,049
- Issue date Jun 25, 2013
- Air Product and Chemicals, Inc.
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Group 2 metal precursors for depositing multi-component metal oxide...
- Patent number 8,247,617
- Issue date Aug 21, 2012
- Air Products and Chemicals, Inc.
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Preparation of metal oxide thin film via cyclic CVD or ALD
- Patent number 8,092,870
- Issue date Jan 10, 2012
- Air Products and Chemicals, Inc.
- Moo-Sung Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Materials for adhesion enhancement of copper film on diffusion barr...
- Patent number 7,919,409
- Issue date Apr 5, 2011
- Air Products and Chemicals, Inc.
- Hansong Cheng
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
New Precursors For Depositing Films With High Elastic Modulus
- Publication number 20240240309
- Publication date Jul 18, 2024
- VERSUM MATERIALS US, LLC
- WILLIAM ROBERT ENTLEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MONOALKOXYSILANES AND DIALKOXYSILANES AND DENSE ORGANOSILICA FILMS...
- Publication number 20240052490
- Publication date Feb 15, 2024
- VERSUM MATERIALS US, LLC
- MANCHAO XIAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALKOXYDISILOXANES AND DENSE ORGANOSILICA FILMS MADE THEREFROM
- Publication number 20230386825
- Publication date Nov 30, 2023
- VERSUM MATERIALS US, LLC
- MANCHAO XIAO
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
CYCLOSILOXANES AND FILMS MADE THEREWITH
- Publication number 20230279030
- Publication date Sep 7, 2023
- VERSUM MATERIALS US, LLC
- FORREST GLENN BROWN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ORGANOAMINO-POLISILOXANES FOR DEPOSITION OF SILICON-CONTAINING FILMS
- Publication number 20230167549
- Publication date Jun 1, 2023
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Silicon Compounds And Methods For Depositing Films Using Same
- Publication number 20230123377
- Publication date Apr 20, 2023
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NEW PRECURSORS FOR DEPOSITING FILMS WITH ELASTIC MODULUS
- Publication number 20230103933
- Publication date Apr 6, 2023
- VERSUM MATERIALS US, LLC
- MANCHAO XIAO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD FOR DEPOSITING A FILM
- Publication number 20230058258
- Publication date Feb 23, 2023
- VERSUM MATERIALS US, LLC
- HARIPIN CHANDRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSORS FOR DEPOSITING FILMS WITH HIGH ELASTIC MODULUS
- Publication number 20220388033
- Publication date Dec 8, 2022
- VERSUM MATERIALS US, LLC
- ROBERT GORDON RIDGEWAY
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
MONOALKOXYSILANES AND DENSE ORGANOSILICA FILMS MADE THEREFROM
- Publication number 20220301862
- Publication date Sep 22, 2022
- VERSUM MATERIALS US, LLC
- MANCHAO XIAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Silacycloalkane Compounds And Methods For Depositing Silicon Contai...
- Publication number 20200075323
- Publication date Mar 5, 2020
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON COMPOUNDS AND METHODS FOR DEPOSITING FILMS USING SAME
- Publication number 20200048286
- Publication date Feb 13, 2020
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Bisaminoalkoxysilane Compounds And Methods For Using Same To Deposi...
- Publication number 20190359637
- Publication date Nov 28, 2019
- VERSUM MATERIALS US, LLC
- Daniel P. Spence
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Alkoxysilylamine Compounds and Applications Thereof
- Publication number 20190225377
- Publication date Jul 25, 2019
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C07 - ORGANIC CHEMISTRY
Information Patent Application
Methods for Depositing Films with Organoaminodisilane Precursors
- Publication number 20180294152
- Publication date Oct 11, 2018
- Versum Materials US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Organoamino-Polysiloxanes For Deposition Of Silicon-Containing Films
- Publication number 20180223428
- Publication date Aug 9, 2018
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Precursors and Flowable CVD Methods for Making Low-K Films to Fill...
- Publication number 20180122631
- Publication date May 3, 2018
- VERSUM MATERIALS US, LLC
- Manchao XIAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for Depositing Films with Organoaminodisilane Precursors
- Publication number 20170186605
- Publication date Jun 29, 2017
- Versum Materials US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BISAMINOALKOXYSILANE COMPOUNDS AND METHODS FOR USING SAME TO DEPOSI...
- Publication number 20160237100
- Publication date Aug 18, 2016
- Air Products and Chemicals, Inc.
- Daniel P. Spence
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING FILMS WITH ORGANOAMINODISILANE PRECURSORS
- Publication number 20160203975
- Publication date Jul 14, 2016
- Air Products and Chemicals, Inc.
- Manchao Xiao
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
ALKOXYAMINOSILANE COMPOUNDS AND APPLICATIONS THEREOF
- Publication number 20160083847
- Publication date Mar 24, 2016
- Air Products and Chemicals, Inc.
- Daniel P. Spence
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AZA-POLYSILANE PRECURSORS AND METHODS FOR DEPOSITING FILMS COMPRISI...
- Publication number 20150147871
- Publication date May 28, 2015
- Air Products and Chemicals, Inc.
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND METHODS USING SAME FOR FLOWABLE OXIDE DEPOSITION
- Publication number 20150056822
- Publication date Feb 26, 2015
- Air Products and Chemicals, Inc.
- Ronald Martin Pearlstein
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALKOXYSILYLAMINE COMPOUNDS AND APPLICATIONS THEREOF
- Publication number 20140158580
- Publication date Jun 12, 2014
- Air Products and Chemicals, Inc.
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ORGANOAMINODISILANE PRECURSORS AND METHODS FOR DEPOSITING FILMS COM...
- Publication number 20130319290
- Publication date Dec 5, 2013
- Air Products and Chemicals, Inc.
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ORGANOAMINODISILANE PRECURSORS AND METHODS FOR DEPOSITING FILMS COM...
- Publication number 20130323435
- Publication date Dec 5, 2013
- Air Products and Chemicals, Inc.
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CATALYST SYNTHESIS FOR ORGANOSILANE SOL-GEL REACTIONS
- Publication number 20130243968
- Publication date Sep 19, 2013
- Air Products and Chemicals, Inc.
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALKOXYAMINOSILANE COMPOUNDS AND APPLICATIONS THEREOF
- Publication number 20130196082
- Publication date Aug 1, 2013
- Air Products and Chemicals, Inc.
- Daniel P. Spence
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
CATALYST AND FORMULATIONS COMPRISING SAME FOR ALKOXYSILANES HYDROLY...
- Publication number 20130180215
- Publication date Jul 18, 2013
- Air Products and Chemicals, Inc.
- Manchao Xiao
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Complexes Of Imidazole Ligands
- Publication number 20130078391
- Publication date Mar 28, 2013
- Air Products and Chemicals, Inc.
- John Anthony Thomas Norman
- C07 - ORGANIC CHEMISTRY

Daniel P. Spence

Person

Patents Grantslast 30 patents

Precursors and flowable CVD methods for making low-k films to fill...

Organoamino-polysiloxanes for deposition of silicon-containing films

Bisaminoalkoxysilane compounds and methods for using same to deposi...

Silacycloalkane compounds and methods for depositing silicon contai...

Alkoxysilylamine compounds and applications thereof

Bisaminoalkoxysilane compounds and methods for using same to deposi...

Alkoxysilylamine compounds and applications thereof

Methods for depositing films with organoaminodisilane precursors

Compositions and methods using same for flowable oxide deposition

Methods for depositing films with organoaminodisilane precursors

Organoaminodisilane precursors and methods for depositing films com...

Catalyst and formulations comprising same for alkoxysilanes hydroly...

AZA-polysilane precursors and methods for depositing films comprisi...

Alkoxyaminosilane compounds and applications thereof

Methods for depositing films with organoaminodisilane precursors

Methods for depositing films with organoaminodisilane precursors

Alkoxyaminosilane compounds and applications thereof

Multidentate ketoimine ligands for metal complexes

Complexes of imidazole ligands

Group 4 metal precursors for metal-containing films

Method for preparing metal complexes of polydentate beta-ketoiminates

Complexes of imidazole ligands

Amidate precursors for depositing metal containing films

Metal complexes for metal-containing film deposition

Liquid precursor for depositing group 4 metal containing films

Liquid composition containing aminoether for deposition of metal-co...

Precursors for depositing group 4 metal-containing films

Group 2 metal precursors for depositing multi-component metal oxide...

Preparation of metal oxide thin film via cyclic CVD or ALD

Materials for adhesion enhancement of copper film on diffusion barr...

Patents Applicationslast 30 patents

New Precursors For Depositing Films With High Elastic Modulus

MONOALKOXYSILANES AND DIALKOXYSILANES AND DENSE ORGANOSILICA FILMS...

ALKOXYDISILOXANES AND DENSE ORGANOSILICA FILMS MADE THEREFROM

CYCLOSILOXANES AND FILMS MADE THEREWITH

ORGANOAMINO-POLISILOXANES FOR DEPOSITION OF SILICON-CONTAINING FILMS

Silicon Compounds And Methods For Depositing Films Using Same

NEW PRECURSORS FOR DEPOSITING FILMS WITH ELASTIC MODULUS

METHOD FOR DEPOSITING A FILM

PRECURSORS FOR DEPOSITING FILMS WITH HIGH ELASTIC MODULUS

MONOALKOXYSILANES AND DENSE ORGANOSILICA FILMS MADE THEREFROM

Silacycloalkane Compounds And Methods For Depositing Silicon Contai...

SILICON COMPOUNDS AND METHODS FOR DEPOSITING FILMS USING SAME

Bisaminoalkoxysilane Compounds And Methods For Using Same To Deposi...

Alkoxysilylamine Compounds and Applications Thereof

Methods for Depositing Films with Organoaminodisilane Precursors

Organoamino-Polysiloxanes For Deposition Of Silicon-Containing Films

Precursors and Flowable CVD Methods for Making Low-K Films to Fill...

Methods for Depositing Films with Organoaminodisilane Precursors

BISAMINOALKOXYSILANE COMPOUNDS AND METHODS FOR USING SAME TO DEPOSI...

METHODS FOR DEPOSITING FILMS WITH ORGANOAMINODISILANE PRECURSORS

ALKOXYAMINOSILANE COMPOUNDS AND APPLICATIONS THEREOF

AZA-POLYSILANE PRECURSORS AND METHODS FOR DEPOSITING FILMS COMPRISI...

COMPOSITIONS AND METHODS USING SAME FOR FLOWABLE OXIDE DEPOSITION

ALKOXYSILYLAMINE COMPOUNDS AND APPLICATIONS THEREOF

ORGANOAMINODISILANE PRECURSORS AND METHODS FOR DEPOSITING FILMS COM...

ORGANOAMINODISILANE PRECURSORS AND METHODS FOR DEPOSITING FILMS COM...

CATALYST SYNTHESIS FOR ORGANOSILANE SOL-GEL REACTIONS

ALKOXYAMINOSILANE COMPOUNDS AND APPLICATIONS THEREOF

CATALYST AND FORMULATIONS COMPRISING SAME FOR ALKOXYSILANES HYDROLY...

Complexes Of Imidazole Ligands