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Daniel R. Tieger
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Manchester, MA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Temperature control for insertable target holder for solid dopant m...
Patent number
11,664,192
Issue date
May 30, 2023
Applied Materials, Inc.
Shreyansh P. Patel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion source with single-slot tubular cathode
Patent number
11,631,567
Issue date
Apr 18, 2023
Applied Materials, Inc.
Bon-Woong Koo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus, system and method for energy spread ion beam
Patent number
11,569,063
Issue date
Jan 31, 2023
Applied Materials, Inc.
Paul J. Murphy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High output ion source, ion implanter, and method of operation
Patent number
11,482,397
Issue date
Oct 25, 2022
Applied Materials, Inc.
Craig Richard Chaney
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Insertable target holder for solid dopant materials
Patent number
11,404,254
Issue date
Aug 2, 2022
Varian Semiconductor Equipment Associates, Inc.
Shreyansh Patel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature control for insertable target holder for solid dopant m...
Patent number
11,170,973
Issue date
Nov 9, 2021
Applied Materials, Inc.
Shreyansh P. Patel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion source with single-slot tubular cathode
Patent number
11,127,557
Issue date
Sep 21, 2021
Applied Materials, Inc.
Bon-Woong Koo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Insertable target holder for improved stability and performance for...
Patent number
10,957,509
Issue date
Mar 23, 2021
Applied Materials, Inc.
Graham Wright
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion source with multiple configurations
Patent number
10,896,799
Issue date
Jan 19, 2021
Applied Materials, Inc.
Klaus Becker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and techniques for decelerated ion beam with no energy co...
Patent number
10,692,697
Issue date
Jun 23, 2020
Varian Semiconductor Equipment Associates, Inc.
Frank Sinclair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and techniques for beam mapping in ion beam system
Patent number
10,431,421
Issue date
Oct 1, 2019
Varian Semiconductor Equipment Associates, Inc.
Eric D. Wilson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion source for enhanced ionization
Patent number
10,290,461
Issue date
May 14, 2019
Varian Semiconductor Equipment Associates, Inc.
Daniel R. Tieger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and techniques for decelerated ion beam with no energy co...
Patent number
10,147,584
Issue date
Dec 4, 2018
Varian Semiconductor Equipment Associates, Inc.
Frank Sinclair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Curved post scan electrode
Patent number
9,905,396
Issue date
Feb 27, 2018
Varian Semiconductor Equipment Associates, Inc.
Frank Sinclair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion source for enhanced ionization
Patent number
9,691,584
Issue date
Jun 27, 2017
Varian Semiconductor Equipment Associates, Inc.
Daniel R. Tieger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for beam current modulation by ion source parameter modulation
Patent number
8,803,110
Issue date
Aug 12, 2014
Axcelis Technologies, Inc.
Michael A. Graf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Carbon implantation process and carbon ion precursor composition
Patent number
8,524,584
Issue date
Sep 3, 2013
Axcelis Technologies, Inc.
William D. Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Aromatic molecular carbon implantation processes
Patent number
8,350,236
Issue date
Jan 8, 2013
Axcelis Technologies, Inc.
W. Davis Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hybrid ion source/multimode ion source
Patent number
8,193,513
Issue date
Jun 5, 2012
Axcelis Technologies, Inc.
William F. DiVergilio
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion source with adjustable aperture
Patent number
8,089,052
Issue date
Jan 3, 2012
Axcelis Technologies, Inc.
Daniel Tieger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for implanting B22Hx and its ionized lower mass byproducts
Patent number
7,759,657
Issue date
Jul 20, 2010
Axcelis Technologies, Inc.
Daniel R. Tieger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for rapidly switching off an ion beam
Patent number
7,589,333
Issue date
Sep 15, 2009
Axcelis Technologies, Inc.
Michael A. Graf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fluorine based cleaning of an ion source
Patent number
7,531,819
Issue date
May 12, 2009
Axcelis Technologies, Inc.
William F. DiVergilio
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS, SYSTEM AND METHOD FOR ENERGY SPREAD ION BEAM
Publication number
20240029997
Publication date
Jan 25, 2024
Applied Materials, Inc.
Paul J. Murphy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Temperature Control For Insertable Target Holder For Solid Dopant M...
Publication number
20230260745
Publication date
Aug 17, 2023
Applied Materials, Inc.
Shreyansh P. Patel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS, SYSTEM AND METHOD FOR ENERGY SPREAD ION BEAM
Publication number
20220319806
Publication date
Oct 6, 2022
Applied Materials, Inc.
Paul J. Murphy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION SOURCE WITH SINGLE-SLOT TUBULAR CATHODE
Publication number
20210383995
Publication date
Dec 9, 2021
Applied Materials, Inc.
Bon-Woong Koo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Temperature Control For Insertable Target Holder For Solid Dopant M...
Publication number
20210375585
Publication date
Dec 2, 2021
Applied Materials, Inc.
Shreyansh P. Patel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION SOURCE WITH SINGLE-SLOT TUBULAR CATHODE
Publication number
20210287872
Publication date
Sep 16, 2021
Applied Materials, Inc.
Bon-Woong Koo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Temperature Control For Insertable Target Holder For Solid Dopant M...
Publication number
20210110995
Publication date
Apr 15, 2021
Applied Materials, Inc.
Shreyansh P. Patel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Insertable Target Holder For Solid Dopant Materials
Publication number
20200090916
Publication date
Mar 19, 2020
Varian Semiconductor Equipment Associates, Inc.
Shreyansh Patel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND TECHNIQUES FOR BEAM MAPPING IN ION BEAM SYSTEM
Publication number
20200027698
Publication date
Jan 23, 2020
Varian Semiconductor Equipment Associates, Inc.
Eric D. Wilson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND TECHNIQUES FOR BEAM MAPPING IN ION BEAM SYSTEM
Publication number
20190139740
Publication date
May 9, 2019
Varian Semiconductor Equipment Associates, Inc.
Eric D. Wilson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion Source For Enhanced Ionization
Publication number
20190122851
Publication date
Apr 25, 2019
Varian Semiconductor Equipment Associates, Inc.
Daniel R. Tieger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND TECHNIQUES FOR DECELERATED ION BEAM WITH NO ENERGY CO...
Publication number
20190051493
Publication date
Feb 14, 2019
Varian Semiconductor Equipment Associates, Inc.
Frank Sinclair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND TECHNIQUES FOR DECELERATED ION BEAM WITH NO ENERGY CO...
Publication number
20180269033
Publication date
Sep 20, 2018
Frank Sinclair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Laser-Induced Borane Production for Ion Implantation
Publication number
20160175804
Publication date
Jun 23, 2016
Axcelis Technologies, Inc.
William Davis Lee
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
CARBON IMPLANTATION PROCESS AND CARBON ION PRECURSOR COMPOSITION
Publication number
20120190181
Publication date
Jul 26, 2012
Axcelis Technologies, Inc.
WILLIAM D. LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Aromatic Molecular Carbon Implantation Processes
Publication number
20110171817
Publication date
Jul 14, 2011
Axcelis Technologies, Inc.
W. Davis Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR IMPLANTING B22Hx AND ITS IONIZED LOWER MASS BYPRODUCTS
Publication number
20090314958
Publication date
Dec 24, 2009
Axcelis Technologies, Inc.
Daniel R. Tieger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION SOURCE WITH ADJUSTABLE APERTURE
Publication number
20090266997
Publication date
Oct 29, 2009
Axcelis Technologies, Inc.
Daniel Tieger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HYBRID ION SOURCE/MULTIMODE ION SOURCE
Publication number
20090032728
Publication date
Feb 5, 2009
Axcebs Technologies, Inc.
William F. DiVergilio
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods for beam current modulation by ion source parameter modulation
Publication number
20080078957
Publication date
Apr 3, 2008
Axcelis Technologies, Inc.
Michael A. Graf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods for rapidly switching off an ion beam
Publication number
20080078955
Publication date
Apr 3, 2008
Axcelis Technologies, Inc.
Michael A. Graf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Fluorine based cleaning of an ion source
Publication number
20070137671
Publication date
Jun 21, 2007
Axcelis Technologies, Inc.
William F. DiVergilio
B08 - CLEANING