Daniel Runde

Person

Satteldorf, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for replacing a mirror in a projection exposure apparatus, a...
- Patent number 11,500,294
- Issue date Nov 15, 2022
- Carl Zeiss SMT GmbH
- Christoph Petri
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for producing an illumination system for an EUV projection e...
- Patent number 11,048,172
- Issue date Jun 29, 2021
- Carl Zeiss SMT GmbH
- Juergen Baier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for producing an illumination system for an EUV projection e...
- Patent number 10,514,608
- Issue date Dec 24, 2019
- Carl Zeiss SMT GmbH
- Juergen Baier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical waveguide for guiding illumination light
- Patent number 10,254,466
- Issue date Apr 9, 2019
- Carl Zeiss SMT GmbH
- Christian Wald
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for EUV projection exposure apparatus, EUV proj...
- Patent number 10,209,620
- Issue date Feb 19, 2019
- Carl Zeiss SMT GmbH
- Christoph Petri
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Determination of a corrected variable
- Patent number 9,841,685
- Issue date Dec 12, 2017
- Carl Zeiss SMT GmbH
- Christoph Petri
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical waveguide for guiding illumination light
- Patent number 9,671,548
- Issue date Jun 6, 2017
- Carl Zeiss SMT GmbH
- Christian Wald
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical beam deflecting element, illumination system including same...
- Patent number 9,025,131
- Issue date May 5, 2015
- Carl Zeiss SMT GmbH
- Daniel Runde
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR REPLACING A MIRROR IN A PROJECTION EXPOSURE APPARATUS, A...
- Publication number 20210294222
- Publication date Sep 23, 2021
- Carl Zeiss SMT GMBH
- Christoph PETRI
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR PRODUCING AN ILLUMINATION SYSTEM FOR AN EUV PROJECTION E...
- Publication number 20200110340
- Publication date Apr 9, 2020
- Carl Zeiss SMT GMBH
- Juergen Baier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR PRODUCING AN ILLUMINATION SYSTEM FOR AN EUV PROJECTION E...
- Publication number 20180373158
- Publication date Dec 27, 2018
- Carl Zeiss SMT GMBH
- Juergen Baier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM FOR EUV PROJECTION EXPOSURE APPARATUS, EUV PROJ...
- Publication number 20180164693
- Publication date Jun 14, 2018
- Carl Zeiss SMT GMBH
- Christoph Petri
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL WAVEGUIDE FOR GUIDING ILLUMINATION LIGHT
- Publication number 20170261680
- Publication date Sep 14, 2017
- Carl Zeiss SMT GMBH
- Christian Wald
- G02 - OPTICS
Information Patent Application
Optical Waveguide for Guiding Illumination Light
- Publication number 20150362660
- Publication date Dec 17, 2015
- Carl Zeiss SMT GMBH
- Christian Wald
- G02 - OPTICS
Information Patent Application
OPTICAL BEAM DEFLECTING ELEMENT, ILLUMINATION SYSTEM INCLUDING SAME...
- Publication number 20120249988
- Publication date Oct 4, 2012
- CARL ZEISS SMT GMBH
- Daniel Runde
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Daniel Runde

Person

Patents Grantslast 30 patents

Method for replacing a mirror in a projection exposure apparatus, a...

Method for producing an illumination system for an EUV projection e...

Method for producing an illumination system for an EUV projection e...

Optical waveguide for guiding illumination light

Illumination system for EUV projection exposure apparatus, EUV proj...

Determination of a corrected variable

Optical waveguide for guiding illumination light

Optical beam deflecting element, illumination system including same...

Patents Applicationslast 30 patents

METHOD FOR REPLACING A MIRROR IN A PROJECTION EXPOSURE APPARATUS, A...

METHOD FOR PRODUCING AN ILLUMINATION SYSTEM FOR AN EUV PROJECTION E...

METHOD FOR PRODUCING AN ILLUMINATION SYSTEM FOR AN EUV PROJECTION E...

ILLUMINATION SYSTEM FOR EUV PROJECTION EXPOSURE APPARATUS, EUV PROJ...

OPTICAL WAVEGUIDE FOR GUIDING ILLUMINATION LIGHT

Optical Waveguide for Guiding Illumination Light

OPTICAL BEAM DEFLECTING ELEMENT, ILLUMINATION SYSTEM INCLUDING SAME...