Daniel S. Herkalo

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Lift pin assembly for substrate processing
- Patent number 7,204,888
- Issue date Apr 17, 2007
- Applied Materials, Inc.
- Toan Q. Tran
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Lift pin assembly for substrate processing
- Publication number 20040219006
- Publication date Nov 4, 2004
- Applied Materials, Inc.
- Toan Q. Tran
- H01 - BASIC ELECTRIC ELEMENTS