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Daniel Skiera
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Langgoens, DE
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last 30 patents
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Patent Grant
Method for inspection and detection of defects on surfaces of disc-...
Patent number
8,705,837
Issue date
Apr 22, 2014
KLA-Tencor MIE GmbH
Detlef Michelsson
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
Method for optical inspection, detection and visualization of defec...
Patent number
8,090,185
Issue date
Jan 3, 2012
Vistec Semiconductor Systems GmbH
Ralf Friedrich
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Method for optical inspection, detection and visualization of defec...
Publication number
20090161097
Publication date
Jun 25, 2009
Vistec Semiconductor Systems GmbH
Ralf Friedrich
G01 - MEASURING TESTING
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Patent Application
METHOD FOR DETECTING DEFECTS ON THE BACK SIDE OF A SEMICONDUCTOR WAFER
Publication number
20080249728
Publication date
Oct 9, 2008
Vistec Semiconductor Systems GmbH
Detlef Michelsson
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method of determining geometric parameters of a wafer
Publication number
20080208523
Publication date
Aug 28, 2008
Vistec Semiconductor Systems GmbH
Rene Schenck
G01 - MEASURING TESTING