Daniel Smith

Person

North Andover, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Pulsed mass flow delivery system and method
- Patent number 7,829,353
- Issue date Nov 9, 2010
- MKS Instruments, Inc.
- Ali Shajii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulsed mass flow delivery system and method
- Patent number 7,628,860
- Issue date Dec 8, 2009
- MKS Instruments, Inc.
- Ali Shajii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulsed mass flow delivery system and method
- Patent number 7,615,120
- Issue date Nov 10, 2009
- MKS Instruments, Inc.
- Ali Shajii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Critical flow based mass flow verifier
- Patent number 7,474,968
- Issue date Jan 6, 2009
- MKS Instruments, Inc.
- Junhua Ding
- G01 - MEASURING TESTING
Information Patent Grant
Mass flow verifier with flow restrictor
- Patent number 7,463,991
- Issue date Dec 9, 2008
- MKS Instruments, Inc.
- Ali Shajii
- G01 - MEASURING TESTING
Information Patent Grant
External volume insensitive flow verification
- Patent number 7,174,263
- Issue date Feb 6, 2007
- MKS Instruments, Inc.
- Ali Shajii
- G01 - MEASURING TESTING
Information Patent Grant
Thermal mass flow rate sensor having fixed bypass ratio
- Patent number 7,121,139
- Issue date Oct 17, 2006
- MKS Instruments, Inc.
- Ali Shajii
- G01 - MEASURING TESTING
Information Patent Grant
Pivotal diaphragm, flow control valve
- Patent number 5,314,164
- Issue date May 24, 1994
- MKS Instruments, Inc.
- Daniel E. Smith
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
Pulsed mass flow delivery system and method
- Publication number 20070039549
- Publication date Feb 22, 2007
- MKS Instruments, Inc.
- Ali Shajii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Pulsed mass flow delivery system and method
- Publication number 20070039550
- Publication date Feb 22, 2007
- MKS Instruments, Inc.
- Ali Shajii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Pulsed mass flow delivery system and method
- Publication number 20070042508
- Publication date Feb 22, 2007
- MKS Instruments, Inc.
- Ali Shajii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
External volume insensitive flow verification
- Publication number 20060217903
- Publication date Sep 28, 2006
- Ali Shajii
- G01 - MEASURING TESTING
Information Patent Application
Mass flow verifier with flow restrictor
- Publication number 20060217900
- Publication date Sep 28, 2006
- MKS Instruments, Inc.
- Ali Shajii
- G01 - MEASURING TESTING
Information Patent Application
Vaporizer and method of vaporizing a liquid for thin film delivery
- Publication number 20060207503
- Publication date Sep 21, 2006
- Paul Meneghini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Thermal mass flow rate sensor having fixed bypass ratio
- Publication number 20060101907
- Publication date May 18, 2006
- Ali Shajii
- G01 - MEASURING TESTING
Information Patent Application
Precursor gas delivery with carrier gas mixing
- Publication number 20060060139
- Publication date Mar 23, 2006
- MKS Instruments, Inc.
- Paul Meneghini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Pulsed mass flow delivery system and method
- Publication number 20050223979
- Publication date Oct 13, 2005
- Ali Shajii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Daniel Smith

Person

Patents Grantslast 30 patents

Pulsed mass flow delivery system and method

Pulsed mass flow delivery system and method

Pulsed mass flow delivery system and method

Critical flow based mass flow verifier

Mass flow verifier with flow restrictor

External volume insensitive flow verification

Thermal mass flow rate sensor having fixed bypass ratio

Pivotal diaphragm, flow control valve

Patents Applicationslast 30 patents

Pulsed mass flow delivery system and method

Pulsed mass flow delivery system and method

Pulsed mass flow delivery system and method

External volume insensitive flow verification

Mass flow verifier with flow restrictor

Vaporizer and method of vaporizing a liquid for thin film delivery

Thermal mass flow rate sensor having fixed bypass ratio

Precursor gas delivery with carrier gas mixing

Pulsed mass flow delivery system and method