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DANIEL T. HURLEY
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Waterbury, VT, US
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last 30 patents
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Patent Grant
Thin wafer carrier
Patent number
9,159,595
Issue date
Oct 13, 2015
Suss MicroTec Lithography GmbH
Daniel T. Hurley
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
THIN WAFER CARRIER
Publication number
20110198817
Publication date
Aug 18, 2011
SUSS MICROTEC INC
DANIEL T. HURLEY
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR