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Daniel Tutuc
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Villach, AT
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last 30 patents
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Patent Grant
Method of reducing trench depth variation from reactive ion etching...
Patent number
10,580,656
Issue date
Mar 3, 2020
Infineon Technologies AG
Marija Borna Tutuc
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Method of Reducing Trench Depth Variation from Reactive Ion Etching...
Publication number
20200013631
Publication date
Jan 9, 2020
Marija Borna Tutuc
H01 - BASIC ELECTRIC ELEMENTS