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Daniël Godfried Emma Hobbelen
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Armsterdam, NL
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last 30 patents
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Patent Application
POSITIONING SYSTEM AND A METHOD FOR POSITIONING A SUBSTAGE WITH RES...
Publication number
20110075122
Publication date
Mar 31, 2011
ASML NETHERLANDS B.V.
Sven Antoin Johan Hol
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
ACTUATOR, POSITIONING SYSTEM AND LITHOGRAPHIC APPARATUS
Publication number
20110069293
Publication date
Mar 24, 2011
ASML NETHERLANDS B.V.
Sven Antoin Johan Hol
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY