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Danny KUO
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Taipei City, TW
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Patents Grants
last 30 patents
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Patent Grant
Method and apparatus for cleaning process monitoring
Patent number
11,926,017
Issue date
Mar 12, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Charlie Wang
C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
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Patent Grant
Method and apparatus for cleaning process monitoring
Patent number
11,007,620
Issue date
May 18, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Charlie Wang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD AND APPARATUS FOR CLEANING PROCESS MONITORING
Publication number
20210252668
Publication date
Aug 19, 2021
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Charlie WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR CLEANING PROCESS MONITORING
Publication number
20190143481
Publication date
May 16, 2019
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Charlie WANG
B24 - GRINDING POLISHING