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Fort Collins, CO, US
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Patent Grant
Delivered energy compensation during plasma processing
Patent number
8,815,329
Issue date
Aug 26, 2014
Advanced Energy Industries, Inc.
Milan Ilic
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
DELIVERED ENERGY COMPENSATION DURING PLASMA PROCESSING
Publication number
20100141221
Publication date
Jun 10, 2010
Milan Ilic
H01 - BASIC ELECTRIC ELEMENTS