Darryl Angelo

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Automated transfer of edge ring requiring rotational alignment
- Patent number 12,142,466
- Issue date Nov 12, 2024
- Lam Research Corporation
- Damon Tyrone Genetti
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Temperature control of a substrate
- Patent number 6,607,640
- Issue date Aug 19, 2003
- Applied Materials, Inc.
- Arvind Sundarrajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pressure modulation method to obtain improved step coverage of seed...
- Patent number 6,458,251
- Issue date Oct 1, 2002
- Applied Materials, Inc.
- Arvind Sundarrajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for ionized metal plasma copper deposition wi...
- Patent number 6,235,163
- Issue date May 22, 2001
- Applied Materials, Inc.
- Darryl Angelo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
EDGE RING TRANSFER WITH AUTOMATED ROTATIONAL PRE-ALIGNMENT
- Publication number 20230047039
- Publication date Feb 16, 2023
- LAM RESEARCH CORPORATION
- Damon Tyrone GENETTI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED TRANSFER OF EDGE RING REQUIRING ROTATIONAL ALIGNMENT
- Publication number 20220246408
- Publication date Aug 4, 2022
- LAM RESEARCH CORPORATION
- Damon Tyrone Genetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT COMPONENTS HAVING QUARTZ CONTACT TIPS
- Publication number 20080105201
- Publication date May 8, 2008
- APPLIED MATERIALS, INC.
- TIMOTHY RONAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Contaminant reducing substrate transport and support system
- Publication number 20050252454
- Publication date Nov 17, 2005
- APPLIED MATERIALS, INC.
- Vijay D. Parkhe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for sputter deposition
- Publication number 20030216035
- Publication date Nov 20, 2003
- APPLIED MATERIALS, INC.
- Suraj Rengarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Self-ionized and inductively-coupled plasma for sputtering and resp...
- Publication number 20030116427
- Publication date Jun 26, 2003
- APPLIED MATERIALS, INC.
- Peijun Ding
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Pressure modulation method to obtain improved step coverage of seed...
- Publication number 20030066747
- Publication date Apr 10, 2003
- APPLIED MATERIALS, INC.
- Arvind Sundarrajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Temperature Control of a substrate
- Publication number 20010025783
- Publication date Oct 4, 2001
- Arvind Sundarrajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Darryl Angelo

Person

Patents Grantslast 30 patents

Automated transfer of edge ring requiring rotational alignment

Temperature control of a substrate

Pressure modulation method to obtain improved step coverage of seed...

Methods and apparatus for ionized metal plasma copper deposition wi...

Patents Applicationslast 30 patents

EDGE RING TRANSFER WITH AUTOMATED ROTATIONAL PRE-ALIGNMENT

AUTOMATED TRANSFER OF EDGE RING REQUIRING ROTATIONAL ALIGNMENT

SUBSTRATE SUPPORT COMPONENTS HAVING QUARTZ CONTACT TIPS

Contaminant reducing substrate transport and support system

Method and apparatus for sputter deposition

Self-ionized and inductively-coupled plasma for sputtering and resp...

Pressure modulation method to obtain improved step coverage of seed...

Temperature Control of a substrate