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Dave Evans
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Santa Clara, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Tactile wafer lifter and methods for operating the same
Patent number
8,657,556
Issue date
Feb 25, 2014
Lam Research Corporation
Keith E. Dawson
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Tactile wafer lifter and methods for operating the same
Patent number
8,317,450
Issue date
Nov 27, 2012
Lam Research Corporation
Keith E. Dawson
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for reducing contamination in a wafer loadlock...
Patent number
6,410,889
Issue date
Jun 25, 2002
Applied Materials, Inc.
Matthew F. Davis
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for reducing contamination in a wafer loadlock...
Patent number
6,323,463
Issue date
Nov 27, 2001
Applied Materials, Inc.
Matthew F. Davis
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
TACTILE WAFER LIFTER AND METHODS FOR OPERATING THE SAME
Publication number
20130066459
Publication date
Mar 14, 2013
Keith E. Dawson
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Tactile Wafer Lifter and Methods for Operating the Same
Publication number
20100111651
Publication date
May 6, 2010
LAM RESEARCH CORPORATION
Keith E. Dawson
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and apparatus for reducing contamination in a wafer loadlock...
Publication number
20020008099
Publication date
Jan 24, 2002
Matthew F. Davis
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...