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David A. Vidusek
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Austin, TX, US
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last 30 patents
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Patent Grant
Method and system for using ion implantation for treating a low-k d...
Patent number
8,372,760
Issue date
Feb 12, 2013
Tokyo Electron Limited
Kenneth Duerksen
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Method and system for using ion implantation for treating a low-k d...
Publication number
20050012201
Publication date
Jan 20, 2005
TOKYO ELECTRON LIMITED
Kenneth Duerksen
H01 - BASIC ELECTRIC ELEMENTS