David Allen Kirkwood

Follow

Person

Arlington, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Film stabilization through novel materials modification of beamline...
- Patent number 10,689,752
- Issue date Jun 23, 2020
- Axcelis Technologies, Inc.
- David A. Kirkwood
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for in-situ beamline film stabilization or remova...
- Patent number 10,580,616
- Issue date Mar 3, 2020
- Axcelis Technologies, Inc.
- Teng-Chao David Tao
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FILM STABILIZATION THROUGH NOVEL MATERIALS MODIFICATION OF BEAMLINE...
- Publication number 20190144991
- Publication date May 16, 2019
- Axcelis Technologies, Inc.
- David A. Kirkwood
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR IN-SITU BEAMLINE FILM STABILIZATION OR REMOVA...
- Publication number 20190108972
- Publication date Apr 11, 2019
- Axcelis Technologies, Inc.
- Teng-Chao David Tao
- H01 - BASIC ELECTRIC ELEMENTS