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David B. Smith

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  • Woburn, MA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Electrostatic chuck ground punch
    • Patent number 8,902,560
    • Issue date Dec 2, 2014
    • Axcelis Technologies, Inc.
    • David B. Smith
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    ELECTROSTATIC CHUCK GROUND PUNCH
    • Publication number 20100110604
    • Publication date May 6, 2010
    • Axcelis Technologies, Inc.
    • David B. Smith
    • H01 - BASIC ELECTRIC ELEMENTS