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David Becher
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Urbana, IL, US
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Patents Grants
last 30 patents
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Patent Grant
High cycle MEMS device
Patent number
7,142,076
Issue date
Nov 28, 2006
The Board of Trustees of the University of Illinois
Milton Feng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High cycle MEMS device
Patent number
6,919,784
Issue date
Jul 19, 2005
The Board of Trustees of the University of Illinois
Milton Feng
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
High cycle MEMS device
Publication number
20050062566
Publication date
Mar 24, 2005
The Board of trustees of the University of Illinois
Milton Feng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High cycle MEMS device
Publication number
20040008099
Publication date
Jan 15, 2004
The Board of trustees of the University of Illinois
Milton Feng
H01 - BASIC ELECTRIC ELEMENTS