David C. Smith

Person

Lake Oswego, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Tin oxide thin film spacers in semiconductor device manufacturing
- Patent number 12,051,589
- Issue date Jul 30, 2024
- Lam Research Corporation
- David Charles Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tin oxide thin film spacers in semiconductor device manufacturing
- Patent number 11,784,047
- Issue date Oct 10, 2023
- Lam Research Corporation
- David Charles Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tin oxide thin film spacers in semiconductor device manufacturing
- Patent number 11,183,383
- Issue date Nov 23, 2021
- Lam Research Corporation
- David Charles Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for suppressing parasitic plasma and reducing w...
- Patent number 11,127,567
- Issue date Sep 21, 2021
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective growth of metal-containing hardmask thin films
- Patent number 11,107,683
- Issue date Aug 31, 2021
- Lam Research Corporation
- David Charles Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tin oxide thin film spacers in semiconductor device manufacturing
- Patent number 11,031,245
- Issue date Jun 8, 2021
- Lan Research Corporation
- David Charles Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition with atomic layer etch reset
- Patent number 10,998,187
- Issue date May 4, 2021
- Lam Research Corporation
- Kapu Sirish Reddy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition of silicon oxide
- Patent number 10,903,071
- Issue date Jan 26, 2021
- Lam Research Corporation
- David Charles Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conformality modulation of metal oxide films using chemical inhibition
- Patent number 10,843,618
- Issue date Nov 24, 2020
- Lam Research Corporation
- David C. Smith
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Selective deposition of silicon nitride on silicon oxide using cata...
- Patent number 10,777,407
- Issue date Sep 15, 2020
- Lam Research Corporation
- David Charles Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Geometrically selective deposition of a dielectric film
- Patent number 10,763,108
- Issue date Sep 1, 2020
- Lam Research Corporation
- Dennis M. Hausmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atomic layer etching methods and apparatus
- Patent number 10,692,724
- Issue date Jun 23, 2020
- Lam Research Corporation
- David Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for suppressing parasitic plasma and reducing w...
- Patent number 10,665,429
- Issue date May 26, 2020
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for selective deposition using a base-catalyzed inhibitor
- Patent number 10,662,526
- Issue date May 26, 2020
- Lam Research Corporation
- Dennis Hausmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective growth of metal-containing hardmask thin films
- Patent number 10,643,846
- Issue date May 5, 2020
- Lam Research Corporation
- David Charles Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pre-treatment method to improve selectivity in a selective depositi...
- Patent number 10,643,889
- Issue date May 5, 2020
- Lam Rasearch Corporation
- Dennis Hausmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective deposition of silicon oxide
- Patent number 10,629,429
- Issue date Apr 21, 2020
- Lam Research Corporation
- David Charles Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition with atomic layer etch reset
- Patent number 10,559,461
- Issue date Feb 11, 2020
- Lam Research Corporation
- Kapu Sirish Reddy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hardware and process for film uniformity improvement
- Patent number 10,526,700
- Issue date Jan 7, 2020
- Lam Research Corporation
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective growth of silicon nitride
- Patent number 10,490,413
- Issue date Nov 26, 2019
- Lam Research Corporation
- David Charles Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective deposition of silicon nitride on silicon oxide using cata...
- Patent number 10,242,866
- Issue date Mar 26, 2019
- Lam Research Corporation
- David Charles Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective growth of silicon oxide or silicon nitride on silicon sur...
- Patent number 10,199,212
- Issue date Feb 5, 2019
- Lam Research Corporation
- David Charles Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition of silicon oxide
- Patent number 10,176,984
- Issue date Jan 8, 2019
- Lam Research Corporation
- David Charles Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated direct dielectric and metal deposition
- Patent number 10,128,116
- Issue date Nov 13, 2018
- Lam Research Corporation
- William T. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hardware and process for film uniformity improvement
- Patent number 10,100,407
- Issue date Oct 16, 2018
- Lam Research Corporation
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective growth of silicon oxide or silicon nitride on silicon sur...
- Patent number 10,043,656
- Issue date Aug 7, 2018
- Lam Research Corporation
- David Charles Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
EUV photopatterning of vapor-deposited metal oxide-containing hardm...
- Patent number 9,996,004
- Issue date Jun 12, 2018
- Lam Research Corporation
- David Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems and methods for vapor delivery in a substrate processing sy...
- Patent number 9,970,108
- Issue date May 15, 2018
- Lam Research Corporation
- Jun Qian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inhibitor plasma mediated atomic layer deposition for seamless feat...
- Patent number 9,966,299
- Issue date May 8, 2018
- Lam Research Corporation
- Wei Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective growth of silicon nitride
- Patent number 9,911,595
- Issue date Mar 6, 2018
- Lam Research Corporation
- David Charles Smith
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING
- Publication number 20240030031
- Publication date Jan 25, 2024
- LAM RESEARCH CORPORATION
- David Charles Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING
- Publication number 20220005694
- Publication date Jan 6, 2022
- LAM RESEARCH CORPORATION
- David Charles Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BUBBLE DEFECT REDUCTION
- Publication number 20220004103
- Publication date Jan 6, 2022
- LAM RESEARCH CORPORATION
- Akhil N. Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN SITU PROTECTIVE COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR...
- Publication number 20210340670
- Publication date Nov 4, 2021
- LAM RESEARCH CORPORATION
- Akhil Singhal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING
- Publication number 20210242019
- Publication date Aug 5, 2021
- LAM RESEARCH CORPORATION
- David Charles Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...
- Publication number 20200335304
- Publication date Oct 22, 2020
- LAM RESEARCH CORPORATION
- Hu Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER ETCHING METHODS AND APPARATUS
- Publication number 20200312670
- Publication date Oct 1, 2020
- LAM RESEARCH CORPORATION
- David Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE GROWTH OF METAL-CONTAINING HARDMASK THIN FILMS
- Publication number 20200227260
- Publication date Jul 16, 2020
- LAM RESEARCH CORPORATION
- David Charles Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING
- Publication number 20200219725
- Publication date Jul 9, 2020
- LAM RESEARCH CORPORATION
- David Charles Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF SILICON OXIDE
- Publication number 20200219718
- Publication date Jul 9, 2020
- LAM RESEARCH CORPORATION
- David Charles Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION WITH ATOMIC LAYER ETCH RESET
- Publication number 20200118809
- Publication date Apr 16, 2020
- LAM RESEARCH CORPORATION
- Kapu Sirish Reddy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR SELECTIVE DEPOSITION USING A BASE-CATALYZED INHIBITOR
- Publication number 20200102650
- Publication date Apr 2, 2020
- LAM RESEARCH CORPORATION
- Dennis Hausmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRE-TREATMENT METHOD TO IMPROVE SELECTIVITY IN A SELECTIVE DEPOSITI...
- Publication number 20200043776
- Publication date Feb 6, 2020
- LAM RESEARCH CORPORATION
- Dennis HAUSMANN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE GROWTH OF METAL-CONTAINING HARDMASK THIN FILMS
- Publication number 20200006073
- Publication date Jan 2, 2020
- LAM RESEARCH CORPORATION
- David Charles Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFORMALITY MODULATION OF METAL OXIDE FILMS USING CHEMICAL INHIBITION
- Publication number 20190203354
- Publication date Jul 4, 2019
- LAM RESEARCH CORPORATION
- David C. Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF SILICON NITRIDE ON SILICON OXIDE USING CATA...
- Publication number 20190148128
- Publication date May 16, 2019
- LAM RESEARCH CORPORATION
- David Charles Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METAL OXIDE SUBSTRATES USING ALE AND SELECTIVE DEPOSITION
- Publication number 20190131130
- Publication date May 2, 2019
- LAM RESEARCH CORPORATION
- David Charles Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF SILICON OXIDE
- Publication number 20190115207
- Publication date Apr 18, 2019
- LAM RESEARCH CORPORATION
- David Charles Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GEOMETRICALLY SELECTIVE DEPOSITION OF A DIELECTRIC FILM
- Publication number 20190057858
- Publication date Feb 21, 2019
- LAM RESEARCH CORPORATION
- Dennis M. Hausmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HARDWARE AND PROCESS FOR FILM UNIFORMITY IMPROVEMENT
- Publication number 20190040528
- Publication date Feb 7, 2019
- LAM RESEARCH CORPORATION
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION WITH ATOMIC LAYER ETCH RESET
- Publication number 20180308680
- Publication date Oct 25, 2018
- LAM RESEARCH CORPORATION
- Kapu Sirish Reddy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EUV PHOTOPATTERNING AND SELECTIVE DEPOSITION FOR NEGATIVE PATTERN MASK
- Publication number 20180308687
- Publication date Oct 25, 2018
- LAM RESEARCH CORPORATION
- David Charles Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE GROWTH OF SILICON NITRIDE
- Publication number 20180269058
- Publication date Sep 20, 2018
- LAM RESEARCH CORPORATION
- David Charles Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE GROWTH OF SILICON OXIDE OR SILICON NITRIDE ON SILICON SUR...
- Publication number 20180261448
- Publication date Sep 13, 2018
- LAM RESEARCH CORPORATION
- David Charles Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF SILICON NITRIDE ON SILICON OXIDE USING CATA...
- Publication number 20180261447
- Publication date Sep 13, 2018
- LAM RESEARCH CORPORATION
- David Charles Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE DEPOSITION OF SILICON OXIDE
- Publication number 20180233349
- Publication date Aug 16, 2018
- LAM RESEARCH CORPORATION
- David Charles Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER ETCHING METHODS AND APPARATUS
- Publication number 20180182634
- Publication date Jun 28, 2018
- LAM RESEARCH CORPORATION
- David Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED DIRECT DIELECTRIC AND METAL DEPOSITION
- Publication number 20180108529
- Publication date Apr 19, 2018
- LAM RESEARCH CORPORATION
- William T. Lee
- G02 - OPTICS
Information Patent Application
SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...
- Publication number 20180068833
- Publication date Mar 8, 2018
- LAM RESEARCH CORPORATION
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING
- Publication number 20180012759
- Publication date Jan 11, 2018
- LAM RESEARCH CORPORATION
- David Charles Smith
- H01 - BASIC ELECTRIC ELEMENTS

David C. Smith

Person

Patents Grantslast 30 patents

Tin oxide thin film spacers in semiconductor device manufacturing

Tin oxide thin film spacers in semiconductor device manufacturing

Tin oxide thin film spacers in semiconductor device manufacturing

Systems and methods for suppressing parasitic plasma and reducing w...

Selective growth of metal-containing hardmask thin films

Tin oxide thin film spacers in semiconductor device manufacturing

Selective deposition with atomic layer etch reset

Selective deposition of silicon oxide

Conformality modulation of metal oxide films using chemical inhibition

Selective deposition of silicon nitride on silicon oxide using cata...

Geometrically selective deposition of a dielectric film

Atomic layer etching methods and apparatus

Systems and methods for suppressing parasitic plasma and reducing w...

Method for selective deposition using a base-catalyzed inhibitor

Selective growth of metal-containing hardmask thin films

Pre-treatment method to improve selectivity in a selective depositi...

Selective deposition of silicon oxide

Selective deposition with atomic layer etch reset

Hardware and process for film uniformity improvement

Selective growth of silicon nitride

Selective deposition of silicon nitride on silicon oxide using cata...

Selective growth of silicon oxide or silicon nitride on silicon sur...

Selective deposition of silicon oxide

Integrated direct dielectric and metal deposition

Hardware and process for film uniformity improvement

Selective growth of silicon oxide or silicon nitride on silicon sur...

EUV photopatterning of vapor-deposited metal oxide-containing hardm...

Systems and methods for vapor delivery in a substrate processing sy...

Inhibitor plasma mediated atomic layer deposition for seamless feat...

Selective growth of silicon nitride

Patents Applicationslast 30 patents

TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING

TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING

BUBBLE DEFECT REDUCTION

IN SITU PROTECTIVE COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR...

TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING

SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...

ATOMIC LAYER ETCHING METHODS AND APPARATUS

SELECTIVE GROWTH OF METAL-CONTAINING HARDMASK THIN FILMS

TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING

SELECTIVE DEPOSITION OF SILICON OXIDE

SELECTIVE DEPOSITION WITH ATOMIC LAYER ETCH RESET

METHOD FOR SELECTIVE DEPOSITION USING A BASE-CATALYZED INHIBITOR

PRE-TREATMENT METHOD TO IMPROVE SELECTIVITY IN A SELECTIVE DEPOSITI...

SELECTIVE GROWTH OF METAL-CONTAINING HARDMASK THIN FILMS

CONFORMALITY MODULATION OF METAL OXIDE FILMS USING CHEMICAL INHIBITION

SELECTIVE DEPOSITION OF SILICON NITRIDE ON SILICON OXIDE USING CATA...

ETCHING METAL OXIDE SUBSTRATES USING ALE AND SELECTIVE DEPOSITION

SELECTIVE DEPOSITION OF SILICON OXIDE

GEOMETRICALLY SELECTIVE DEPOSITION OF A DIELECTRIC FILM

HARDWARE AND PROCESS FOR FILM UNIFORMITY IMPROVEMENT

SELECTIVE DEPOSITION WITH ATOMIC LAYER ETCH RESET

EUV PHOTOPATTERNING AND SELECTIVE DEPOSITION FOR NEGATIVE PATTERN MASK

SELECTIVE GROWTH OF SILICON NITRIDE

SELECTIVE GROWTH OF SILICON OXIDE OR SILICON NITRIDE ON SILICON SUR...

SELECTIVE DEPOSITION OF SILICON NITRIDE ON SILICON OXIDE USING CATA...

SELECTIVE DEPOSITION OF SILICON OXIDE

ATOMIC LAYER ETCHING METHODS AND APPARATUS

INTEGRATED DIRECT DIELECTRIC AND METAL DEPOSITION

SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...

TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING