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David Callan
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Norwalk, CT, US
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last 30 patents
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Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,714,305
Issue date
May 11, 2010
ASML Holding N.V.
Huibert Visser
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
6,879,377
Issue date
Apr 12, 2005
ASML Netherlands B.V.
Hernes Jacobs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Dynamically adjustable high resolution adjustable slit
Patent number
6,097,474
Issue date
Aug 1, 2000
SVG Lithography Systems, Inc.
Andrew W. McCullough
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of controlling illumination field to reduce line width varia...
Patent number
6,013,401
Issue date
Jan 11, 2000
SVG Lithography Systems, Inc.
Andrew W. McCullough
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20070162781
Publication date
Jul 12, 2007
ASML NETHERLANDS B.V.
Huibert Visser
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20070150779
Publication date
Jun 28, 2007
ASML NETHERLANDS B.V.
Huibert Visser
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20030137643
Publication date
Jul 24, 2003
ASML NETHERLANDS B.V.
Hernes Jacobs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY