David Chipman

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Lynn, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Carbon nanotube electrostatic chuck
- Patent number 11,069,554
- Issue date Jul 20, 2021
- Applied Materials, Inc.
- Dawei Sun
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Thermal shield for electrostatic chuck
- Patent number 10,157,764
- Issue date Dec 18, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Dale K. Stone
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Apparatus for the backside gas cooling of a wafer in a batch ion im...
- Patent number 6,583,428
- Issue date Jun 24, 2003
- Axcelis Technologies, Inc.
- David J. Chipman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for capturing and removing contaminant particles from an int...
- Patent number 5,670,217
- Issue date Sep 23, 1997
- Eaton Corporation
- Julian G. Blake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for capturing and removing contaminant particles from an...
- Patent number 5,656,092
- Issue date Aug 12, 1997
- Eaton Corporation
- Julian G. Blake
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CARBON NANOTUBE ELECTROSTATIC CHUCK
- Publication number 20210225682
- Publication date Jul 22, 2021
- Applied Materials, Inc.
- Dawei Sun
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Thermal Shield For Electrostatic Chuck
- Publication number 20160379861
- Publication date Dec 29, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Dale K. Stone
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER