David Dixon

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Austin, TX, US

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Patents Grantslast 30 patents

Information Patent Grant
Multi-pitch scatterometry targets
- Patent number 8,024,676
- Issue date Sep 20, 2011
- Tokyo Electron Limited
- Michael A. Carcasi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system to compensate for lamp intensity differences in a...
- Patent number 7,680,321
- Issue date Mar 16, 2010
- Tokyo Electron Limited
- David Dixon
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for monitoring photolithography processing based...
- Patent number 7,591,600
- Issue date Sep 22, 2009
- Tokyo Electron Limited
- David Dixon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for facilitating preventive maintenance of an opt...
- Patent number 7,478,014
- Issue date Jan 13, 2009
- Tokyo Electron Limited
- David Dixon
- G01 - MEASURING TESTING
Information Patent Grant
Scatterometry target for determining CD and overlay
- Patent number 7,449,265
- Issue date Nov 11, 2008
- Tokyo Electron Limited
- David Dixon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system to compensate for lamp intensity differences in a...
- Patent number 7,359,545
- Issue date Apr 15, 2008
- Tokyo Electron Limited
- David Dixon
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Multi-Pitch Scatterometry Targets
- Publication number 20100209830
- Publication date Aug 19, 2010
- TOKYO ELECTRON LIMITED
- Michael A. Carcasi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM TO COMPENSATE FOR LAMP INTENSITY DIFFERENCES IN A...
- Publication number 20080218745
- Publication date Sep 11, 2008
- TOKYO ELECTRON LIMITED
- David Dixon
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR MONITORING PHOTOLITHOGRAPHY PROCESSING BASED...
- Publication number 20080204734
- Publication date Aug 28, 2008
- TOKYO ELECTRON LIMITED
- David Dixon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and system for facilitating preventive maintenance of an opt...
- Publication number 20080082283
- Publication date Apr 3, 2008
- TOKYO ELECTRON LIMITED
- David Dixon
- G02 - OPTICS
Information Patent Application
Method and system to compensate for lamp intensity differences in a...
- Publication number 20050146716
- Publication date Jul 7, 2005
- TOKYO ELECTRON LIMITED
- David Dixon
- G01 - MEASURING TESTING