David Erskine

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Mountain View, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and system for clamping semiconductor wafers
- Patent number 5,262,029
- Issue date Nov 16, 1993
- Lam Research
- David Erskine
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...